Bernoulli Gripper

For pressure sensor details, refer to the PSE540 series in the Web Catalog and the Operation Manual. 11 Bernoulli Gripper ZNC Series Dimensions: 20 (With mounting plate) Basic type (24) 7.5 2 x M2.5 thread depth 4.2 16.5 M5 x 0.8 thread depth 3.7 Multi-port2, 4, 5 11.8 2 x M3 x 0.5 thread depth 6 45 6.5 Counterbore diameter 8.5, depth 0.8 35 11.3 20 16 With a plug attached: 2.2 M5 x 0.8 thread

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 2-M5 x 0.8 4(A), 2(B) port Direct manual override Indicator light 0.5 0.5 4 (11) 11 2 5.5 0.6 0.6 15 5.3 5.3 13 34 33 25.5 29 6 3 L plug connector (L) 21.5 4 2-3.5 mounting hole 28.5 49 50.5 2-M5 x 0.8 1(P), 3(R) port 3 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

10

A B C +0.030 4H9 0 depth 4 2 x 6.6 through (Body mounting hole) 2 4 3 52 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M6 x 1 thread depth 12 (Mounting thread) +0.052 27H9 0 depth 1.5 5 +0.030 4H9 0 depth 4 Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger opening port) 4 x M6 x 1 (Piston rod and rack screw) H 65 M5 x 0.8 (Finger closing port) 28.2 11 1 20 10 10

MQQ

0.5 M4 x 0.7 7 35 + Stroke 35 + Stroke 7 Standard type: MQQT CC 40 + Stroke 8.5 13 to 17 M5 x 0.8 M6 x 1 45 + Stroke 9 RB 7.5 50 + Stroke 8 to 11 M3 x 0.5 65 + Stroke M4 x 0.7 7 J Anti-lateral load type: MQQL (Built-in ball bushing type) 70 + Stroke 5.5 80 + Stroke 8 13 to 17 M5 x 0.8 M6 x 1 D6.5 85 + Stroke 105 + Stroke 7 -X : Stroke 20Data 10-5-11 11 Series MQQ Dimensions Basic style (Through-hole

MQQ

x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed:19 2-M5 X

3 Port Solenoid Valve

Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 5 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Body ported S070C-G-32 Grommet

Ionizer

Note) Bar length (mm) KJH04-M5-X34 460 to 700 860 to 1580 1660 to 2220 Note) Plug (M-5P-X112) 1 pc. is shipped together. Symbol X13 2 Non-standard power supply cable length Available in 1 m increments from 1 m to 20 m. Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power cables for 3 m and 10 m lengths.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Support Guide/11-LEFG Series

11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

CJP

Round type Flat type 5.5 NTP-006 CJ-CR006 CJ-CF006 6.4 1.8 M3 x 0.5 6 6 8 11 6 M3 x 0.5 5 6 8 7 NTP-010 CJ-CR010 CJ-CF010 8.1 2.4 M4 x 0.7 10 8 10 13 10 M4 x 0.7 6 8 10 8 NTP-015 CJ-CR016 CJ-CF016 9.2 3.2 M5 x 0.8 15 10 12 15 15 M5 x 0.8 7 10 12 6-2-13 8 Pin Cylinder Single Acting, Single Rod, Single Return Series CJP 6, 10, 15 How to Order A short stroke miniature cylinder with a shorter

CJP

Round type Flat type 5.5 NTP-006 CJ-CR006 CJ-CF006 6.4 1.8 M3 x 0.5 6 6 8 11 6 M3 x 0.5 5 6 8 7 NTP-010 CJ-CR010 CJ-CF010 8.1 2.4 M4 x 0.7 10 8 10 13 10 M4 x 0.7 6 8 10 8 NTP-015 CJ-CR016 CJ-CF016 9.2 3.2 M5 x 0.8 15 10 12 15 15 M5 x 0.8 7 10 12 6-2-13 8 Pin Cylinder Single Acting, Single Rod, Single Return Series CJP 6, 10, 15 How to Order A short stroke miniature cylinder with a shorter

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: M5 (M5X0.8)

The SYA uses the same manifolds as series SY (non plug-in style) for types 20, 41, 42 and 45. One-touch fittings are available on body ported types. 

Exhaust Cleaner for Clean Rooms AMP Series

Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi or less) Ambient and fluid temperature 5 to 50C (41

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .07654 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .15976 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .33069 lb