70pvpump

Circuit example/Built-in solenoid valve Ball valve Regulator FLUID OUT AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 17-5-166 27 Series PB Process Pump: Built-in Solenoid Valve Type/ Air Operated Type (External Switching Type) Dimensions PB1000 FLUID OUT Rc 1/8 VC 11 OUT VDW 11 VQ 84 72 VX2 Mount with this surface (out port side) on top 7.5 41 60 45 VX Courtesy

VXA21/22

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5

V

18 33.2 38 32.4 57 19 H O W T O O R D E R ZP V A C U U M P A D S ZP F L AT T Y P E PA D W I T H R I B P A D D I A M E T E R P A D M AT E R I A L Part No Type A C B D E F Y 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 N Nitrile Rubber (Standard) S Silicon Rubber U Urethane F Fluorine Rubber GN Anti-static Nitrile Rubber GS Anti-static Silicon Rubber ZP10C C10 10 12 41

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ISO 9002] SMC Taiwan [ISO 9002] SMC UK [ISO 9001/ISO14001] SMC US [ISO 9001] 15 Table of Contents Page Page Actuators Valves Pin Cylinder/Series CJ1 38 Gas and Chemical Liquid Valve/Series LVM 17 Miniature Cylinder/Series CJP 39 High Purity Chemical Valve/Series LV 18 Mini Free-Mount Cylinder/Series CUJ 40 Ultra Compact Valve. 3 Port Solenoid Valve 19 Electric Actuator/Series LG, LJ, LX 41

Series SYJA300 3 Port Air Operated Valve

SS3YJA5-40-031-01 SS3YJA7-41-031-01 SYJA714 1 pc. 2 pcs. 1 pc. 1 pc. 2 pcs. 1 pc. SYJA514 SYJ500-10-3A . SYJ700-10-2A .. Pilot Pressure Range 0.6 Pilot pressure (MPa) Pilot pressure range 0.5 0.4 Caution 0.3 Be sure to read before handing.

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. 0.2 SS5YJA3-41-03-M51 pc. SYJA3140 1 pc. SYJA3240 1 pc.

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-41 41 Date issued: Photo copying this page is recommended.

2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

VQ7-6/7-8

Sockets Mounting bolts VQ7-6: M5 VQ7-8: M6 Proper tightening torque Nm 0.8 to 1.2 Receptacle housing Window Coil 41 Series VQ7-6/7-8 Specific Product Precautions 2 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

%silltr

+o.o (s6.7) 48.3 71 .5 84.9 342.5 50.9 25.4 67 .4 a a 7 4.4 2.2 1 . 1 0.55 ls.s 22 1 1 40 250 125 oc .tc 54.6 47.6 52.4 72.4 39 (86) 46.3 /oa ll 46.6 55.8 27.9 73.9 37 3.9 2 78 39 20.3 10.9 50 400 200 100 50 EA (87) 43.5 (e6.5) 48.3 71 .3 35.7 84.8 42.4 50.8 25.4 (ee.2) 51.6 27.4 68.3 36.8 1 0.5 79.9 40 20 0 63 650 300 150 75 (e4.4) 47.2 82.3 41 .1 (s1.2) 45.6 67.4 33.7 80.1 40.1 4A 24 31

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5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.

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41"ry19e: 4-position dual 3-port valves for \ \ ..;'r..:.. independent control of ' .:1-.i/-9-.A & B ports Availabe conf igurations [N.C./N.C ]. I N I n / N l / . \ I n i r N l a / N l ^ l : , ! . : ' : ) ' , + . .

Industrial Filter FGD Series

Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C

HAW

(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 45 48.5 52 45 41 43 45.5 34.5 35.5 36 39 40 42.5 15000 18000 20 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. 16

1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--