SX

188 168 11 204 184 12 220 200 13 236 216 14 252 232 15 268 248 16 284 264 17 300 280 18 316 296 19 332 312 L1 L2 1-6-45 46 SX7000: SS5X7-20Stations Grommet (G) 2n2-One-touch fittings (A, B port) 2n1-Rc 1/4 (A, B port) 6-Rc 1/4 L1 L2 Applicable tubing O.D.: 8 (Mounting hole) 4-4.5 10 (P, EA, EB port) 10 16.5 11.5 22.4 76.8 19.5 19 20.5 B A B A B A B A B A B A B A 20 20 EA EB P EB EA P 21

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

T MODEL SC 120 80 4 46.2 1 ERR T/R RUN (35) 0 10.6 Drawing shows a SC case. 4 x M5 mounting hole D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting EXH EXH R DIN rail clamp screw R 24.5 9.5 B B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

T MODEL SC 120 80 4 46.2 1 ERR T/R RUN (35) 0 10.6 Drawing shows a SC case. 4 x M5 mounting hole D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting EXH EXH R DIN rail clamp screw R 24.5 9.5 B B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

LJ1H

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover R Motor cover L Auto switch Magnet Brake Material Note 100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

KJ

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Table of Contents

1 Aluminum Nozzle AN203-KM8 Silencer r !2 Aluminum Diffuser ZYY3000-NPA Non plug assembly t !3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !

Compact 5-Port Solenoid Valve

2 B 2 B 2 B 2 B 56.6 P 1 1 P 30.5 29.1 A 4 A 4 A 4 A 4 A 4 8.7 11.1 12.5 22.7 18 (Pitch) P=16 (10) (14.3) (For DIN rail mounting) (23.3) One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.

Series SV

Characteristics Port size Flow characteristics Model 14, 2(PA, B) 4, 25, 3(A, BEA, EB) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) C[dm3/(sbar)] Cv Cv b b C[dm3/(sbar)] C6 SS5V1-10 C8 0.96 0.24 0.28 0.26 0.35 1.1 C8 SS5V2-10 C10 2.1 0.46 0.48 0.20 0.18 2.4 C10 SS5V3-10 C12 4.2 0.91 0.93 0.22 0.21 4.3 C12 SS5V4-10 C12 6.2 1.3 1.6 0.19 0.18 7.0 Note) Value is for manifold base with 5 stations and individually

Made to Order

CDQ2-XC88 -XC89 Both ends tapped: CDQ2A O1 thread R R Both Ends Tapped Through-hole (Standard): CDQ2B (mm) Bore size (mm) 32 40 50 O1 R M6 x 1.0 M6 x 1.0 10 10 14 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through 8 x O counterbore M8 x 1.25 F Q 2 x P (Rc, NPT, G) (Port size) Th9 D M E Z 10 E M K B + Stroke L A + Stroke J W (mm) With Boss on Head End

High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

Table of Contents

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

Micro Mechanical Valve Series VM1000

3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

0.4

EXH port] (C12 in case of branch type) C10 [3(R) EXH port] C10: 10 One-touch fitting C10: 10 One-touch fitting (C12: 12 One-touch fitting) DIN rail clamp screw R R 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 18 1 1 A A A A A A A A 10 13.5 C10 [1(P) SUP port] C10: 10 One-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C4, C6, C8, [4(A), 2(B) port] P = 16 45 25 C10: 10

Proposals for Energy Saving

-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 D H2 H1 L2 L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17

SV

SUP spacer 59.5 MAX.14 SV100-05SV100-0645.5 (N7:7) (C6:3.2) 10 (For DIN rail mounting) (7.5) B B B B 109.5 102.9 111.4 118 100.4 91.9 A A A A 90 B A B A B A B A Dimensions are the ones for SV1300--.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

Table of Contents

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead