Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

HRX-OM-Q026

(HRSH100-A-20/40-, HRSH100-W-20/40-) 8.5.2 HRSH150/200-A-20/40HRSH150/200/250-W-20/400.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-17: Pump capacity (HRSH150/200-A-20/40-HRSH150/200/250-W-20/40-) 8.5 Pump

CM2

SCM220A, #10, #19 CM2E25SCM225A, #10 SCM225A, #10, #19 CM2E32SCM232A, #10 SCM232A, #10, #19 CM2E40SCM240A, #10 SCM240A, #10, #19 The data shows auto switch equipped styles.

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

240

type LEPY Series Page 374 25 to 50 6.0 1.5 200 5 24 to 40 4.0 1.5 200 10 12.5 to 25 3.0 1.0 350 10 12 to 20 2.0 1.0 350 14 to 20 1.0 0.5 150 4 6 Slide table type LEPS Series 7 to 10 0.75 0.25 300 8 25 50 Page 383 25 to 50 2.0 1.5 200 5 24 to 40 2.0 1.5 200 10 12.5 to 25 1.5 1.0 350 10 12 to 20 1.5 1.0 350 370 LEPY/LEPS Series Mounting Variations Mounting from various directions Side mounting

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

Series SV

30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

Smooth Cylinder/Low Speed Cylinder

Vacuum port, Refief port 1 to 200 mm/s 0.5 to 200 mm/s 8 M8 x 1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 REC M10 x 1.25 M10 x 1.25 +1.4 0 mm CY 1/8 1/8 1/4 1/4 M5 x 0.8 CX CX Precautions MQ RHC Be sure to read before handling.

SV

400 CM2 20 MB 32 10% 30% 50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

1.63

pressure 0.5 MPa Ball bushing MGPWL20 to 25, MGPWA20 to 25 (5) 25 stroke or less, V = 200 mm/s or less (6) Over 26 stroke, 100 stroke or less, V = 200 mm/s or less 10 10 25 25 20 20 Load mass m (kg) Load mass m (kg) 1 1 0.1 0.1 10 100 10 100 Eccentric distance L (mm) Eccentric distance L (mm) (7) Over 101 stroke, 200 stroke or less, V = 200 mm/s or less 10 25 20 Load mass m (kg) 1 0.1 10

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

CXWM/CXWL

Bore size/Stroke (mm) 10 (25), 50, 75, 100 16 (25), 50, 75, 100, 125, 150, 175, 200 20 (25), 50, 75, 100, 125, 150, 175, 200 25 (25), 50, 75, 100, 125, 150, 175, 200 (25), (50), 75, 100, 125, 150, 175, 200 End lock 32 R End lock Note1) For the strokes indicated in the parentheses of the 10, 16 and 25, shock absorbers are to be mounted on both sides of the plate.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 Mey m 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

(mm) 125 14 10 17 160 180 14 10 17 140 14.5 10 17 200 14.5 10 17 13 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 ~ = " Hs A 13 12 7.5 8 7 7 6 6 7 7 " Ht 5.5 5 6 6 5 ~ = 10 10 10 11 11 Since this is a guideline including hysteresis, not meant to be guaranteed.

Thermo-chiller

VAC (50 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Electrical system Earth leakage breaker (Standard) Rated current A 30 Sensitivity current mA 30 Rated operating current 50/60 Hz A 14/17 Rated power consumption 50/60 Hz kW(kVA) 4.3/5.3 (4.9/5.8) Communication function

energy saving effect

Cooling Capacity HRSH300-A-20/4035 Ambient temperature 32C 30 Ambient temperature 43C 28 Cooling capacity [kW] 25 HRS 20 Ambient temperature 45C HRS 090 15 10 HRS 100/150 5 HRSH 090 5 10 15 20 25 30 35 0 HRSH HRSH Circulating fluid temperature [C] HRSE Pump Capacity HRZ HRSH100-A-20/40HRSH100-W-20/40HRSH150/200-A-20/40HRSH150/200/250-W-20/40HRZD HRW 0.6 0.6 60 60 Circulating fluid pressure

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position