XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

LG1H

20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

HRX-OM-W002

20 30 40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

30.5 31.5 18.5 19.5 Grommet (Perpendicular) Reed switch Model Model 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 D-A90V 5 25.5 26.5 13.5 14.5 A B A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

KR

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

Air Cylinder Series MB

M27 X 2 10 11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support Brackets Available combinations Refer to below picture together.

0.4

One-touch fitting (C12: 12 One-touch fitting) Output connector D side 8 Stations 7 6 5 4 3 2 1 U side n DIN rail clamp screw DIN rail clamp screw C10: 10 One-touch fitting C10 [3(R) EXH port] 56.6 30 R R 8 11.5 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 1 A 1 A A A A A A A 13.5 10 (12) C10: 10 One-touch fitting C10 [1(P) SUP port] (7.5) 25 P = 16 45 C4, C6, C8 [4(A), 2(B) port] C4:

CNG

A1 E1 L1 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 16 20 22 +0.4 +0.2 8 16 34 41 42 2 25, 32 40 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 8 10 10 21 11.5 25 30 30 20 34 41 42 8.5 M8 x 1.25 10.3 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 20 M10 x 1.25 25.6 14 M10 x 1.25 12.8 25, 32 40 10.5 16 +0.5 +0.3 18 M14 x 1.5 41.6

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure Pressure 40 30 External hold 0.2MPa 0.2MPa 30 0.3MPa 0.3MPa 0.4MPa 20 0.4MPa 20 0.5MPa 0.5MPa 0.6MPa 10 0.6MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-30/MDHR2-30 80 50 H 70 Overhang distance H (mm) Overhang distance H (mm

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Cylinder with Lock Series CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Compressed Air Preparation Filter

Improved visibility due to 2-color indication Functional element (Green) Element requiring replacement (Red) 2 Modular Connection Type Compressed Air Preparation Filter AFF/AM/AMD/AMK Series Lightweight Series Size Weight [kg] Reduction rate [%] Weight AFF/AM/AMD1 20 0.19 b 0.38 50 Max. 50% lighter 1 30 0.39 b 0.55 29 0.19 kg b 0.38 kg 40 0.79 b 0.9 12 50 1.23 b 1.4 12 60 1.46 b 2.1 30 AMK2

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa