Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

CL

43.4 11 13 15 18 28 28 28 30 14 16 20 22 16 20 22 30 10 10 10 10 5.5 5.5 6.6 6.6 3.2 3.2 4.5 4.5 25 30 35 40 52.5 39.8 48 57.5 49.4 59.4 66 58.4 71.4 (Hole dia.)

CJ2

, 16 How to Order Bore size 6 10 16 Standard stroke (mm) 6 10 16 6 mm 10 mm 16 mm 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

TABLE OF CONTENTS

(G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB (G or L) LW53KK8XGB (G or L) 215 215 135 70 55 120 120 10 55 85 70 55 50 50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40

MGP

20 30 40 50 51 100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

, 15, 20, 30, 40 How to Order Size 10 15 20 30 40 CRBU2 10 180 S E W Without auto switch Connection port location Nil E Side ported Axial ported Size 10 15 With auto switch Size: 10, 15 T99 L 180 S CDRBU2 10 W CDRBU2 20 W 180 S T79 L With auto switch Size: 20, 30, 40 Size 20 30 40 Made to Order Refer to the table below for details.

Best Pneumatics Vol. 14

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Auto Switch Guide

-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit 8-30-25 Grommet 8-30-26 Rail 8-30-27 Connector Grommet Tie-rod Terminal conduit 8-30-28 8-30-31 8-30-29 8-30-30 8-30-32 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

Auto Switch Guide

-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit 8-30-25 Grommet 8-30-26 Rail 8-30-27 Connector Grommet Tie-rod Terminal conduit 8-30-28 8-30-31 8-30-29 8-30-30 8-30-32 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

Auto Switch Guide

-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit 8-30-25 Grommet 8-30-26 Rail 8-30-27 Connector Grommet Tie-rod Terminal conduit 8-30-28 8-30-31 8-30-29 8-30-30 8-30-32 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

CRQ2

of rotating range Without inner rubber bumper Fluoro grease 10, 15, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

35 35 20 22 26 30 33 39 5 5.5 5.5 6 7 7 104 111 117 135 155 161 1/8 1/8 1/8 1/8 1/4 1/4 15.5 19.5 19.5 27 32 32 6 8 10 14 18 18 2 2 2 2 2 2 75 77 83 94 108 114 13 17 17 19 27 27 30.4 36.4 42.4 52.4 64.5 76.6 10 10 10 10 12 12 38 44 45 55 62 64 8 10 12 16 20 20 27 32 32 39 45 45 11 12 13 16 17 19 12 14 18 25 30 32 5 6 6 8 11 11 Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 26

smcmaintenancepartslist

-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS8-PS MIS-A1204 MIS12-PS MH-G01 (contents quantity

MXQ

Standard Stroke Model Standard stroke (mm) 10, 20, 30, 40, 50 MXQ6 10, 20, 30, 40, 50, 75 MXQ8 10, 20, 30, 40, 50, 75, 100 MXQ12 10, 20, 30, 40, 50, 75, 100, 125 MXQ16 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ20 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ25 8-5-9 10 Series MXQ Theoretical Output IN OUT The dual rod ensures an output twice that of existing cylinders.

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

Modular F.R.L. Unit

Description Model AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B Round G27-10-R1 G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 Pressure gauge Note 1) Square Note 2) embedded type 1.0MPa GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Attachments Accessories G27-10-R1 Note 3) G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46

LX

) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Air Cylinder

Rod Trunnion (U) with Pivot Bracket TS Bracket mounting range B TH TT 4 x TF Z TW TY TX TV +0.10 0 TE Male Thread Female Thread (mm) (mm) Bore size B TE TF TH TS TT TV TW TX TY Z 20 38 10 5.5 25 28 3.2 35.8 42 16 28 46 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 51 32 54 10 6.6 35 40 4.5 49.4 48 22 28 51 40 63.5 10 6.6 40 49 4.5 58.4 56 30 30 62 50 79 20 9 50 60 6 72.4 64 36 36 71 63 96 20 11

Table of Contents

) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard