45

Nil Rc G F N NPT NPTF T Dimensions Caution Applicable fittings size d 4 Model A L D Mounting screw tightening torques M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Warning KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 When mounting a valve or spacer on the manifold base or sub-plate

5 Port Air Operated Valve Series SYA3000/5000/7000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

Pin Clamp Cylinders

x 4 L) and spring washer (M3).

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 100 300 500 1000 W Piston speed (mm/s) Graph (1) Moment M1, M3 M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4

7.4

Rc1/8 SS0752-C Manifold pitch: 8.5 mm Page 750 C Kit: Connector Max. 20 stations 115 20 M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") Rc1/8 Note 2) 115 20 S Kit: Serial transmission (EX510) Max. 16 stations Base Mounted SS0755-CC Manifold pitch: 7.5 mm Page 750 M3 (M3 thread) V2 (2 Barb fitting) V3 (3.2 Barb fitting) V4 (5 Barb fitting) C Kit: Connector Max. 20 stations 75 10 M5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0.2 28 0.2 22.7 35 37 16 6.3 5 12 2-R 3.5 2-M2.5 x 0.45 x 6l 4-M3 x 0.5 (Through-hole) 6 7 (Hexagon socket head cap screw) 2-M3 x 0.5 x 12.5l, 2-M3 x 0.5 (Hexagon bolt) (Hexagon nut) 4-M3 x 0.5 (Through-hole) W (10) 4-M3 x 0.5 thread depth 4.5 (Opposite side: Same) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Smooth Cylinder/Low Speed Cylinder

MQ CUX20-PS Rod seal: 1 pc. 10 16 20, 25 32 0.54 10% M3 CUX25-PS Gasket: 1 pc. RHC 1.23 10% M4 Grease pack (10 g): 1 pc. CUX32-PS 2.55 10% M5 It is impossible to replace seals in bore size 10 mm. RZQ 4.02 10% M6 Operating Precautions Warning 2. Grease pack When maintenance requires only grease, use the following part numbers to order.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

A port B port 2-M3 x 0.5 11 11-5-10 10 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

The intersection H is the amount of water included in the compressed air 1 m3 at 0.7 MPa, pressure dew point of 25C. The amount of water is 3.0 g/m3. 10. Therefore, the amount of condensed water is as following.

A

-32UNF M3 0.14 5/32 3/8 0.04 0.12 NCRB1_W10-_S 0.55 0.20 0.35 0.02 0.20 25 0.95 1.14 0.59 0.31 0 -0.00015 (0.2) (0.26) M3 NCRB1_W10-_SE 0.33 0.37 -0.0012 -0.00045 5-40UNC 5-40UNC 0.14 10-32UNF M3 3/16 15/32 0.06 0.16 NCRB1_W15-_S 0.71 0.24 0.39 0.02 1.14 0.20 25 1.34 0.79 0.35 0 -0.00015 (0.2) (0.39) (0.24) M3 NCRB1_W15-_SE 0.43 0.39 -0.0016 -0.00045 8-32UNC 8-32UNC 0.18 10-32UNF 15/64 9/

Made to Order

CXS25 0.1 1.0 0.5 0.05 0.0 10 50 100 200 300 500 1000 1500 0 20 40 60 80 100 120 Stroke (mm) Cylinder speed Vp (mm/s) Dimensions J I K (mm) I 3.25 5 6 7 7 9 J 6.5 10 12 14 14 18 K 7 7 7 10 10 12 N M3 x 0.5 through-hole M3 x 0.5 through-hole M3 x 0.5 through-hole M4 x 0.7 thread depth 6 M5 x 0.8 thread depth 7.5 M5 x 0.8 thread depth 8 Bore size (mm) 6 10 15 20 25 32 -X -X 2-N 1747 Made to

VZ5000

2-Rc 1/8 (EXH port) Blanking Plate Assembly DXT199-22-1A Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 8 With spring washer Blanking plate Round head combination screw Interface Regulator (P port regulation) Gasket Interface style regulators can be placed on top of the manifold base to reduce the pressure of each of the valves. ( ) M3 x 10 With spring washer

REA/REB

S 70 100 300 500 600 CEP1 Maximum speed (mm/s) CE1 Moment CE2 M1, M3 M2 (Static moment/Dynamic moment) Allowable Moment ML2B 100 100 85 96 REBHT32 REBHT32 64 56 (Nm) 50 40 30 50 40 30 REBHT25 REBH25 REBHT25 REBH25 C J G5-S M2 16 26 85 96 M3 10 28 56 64 M1 10 28 56 64 Model REBH15 REBH25 REBHT25 REBHT32 28 26 20 20 CV 16 REBH15 REBH15 13 Moment (Nm) Moment (Nm) 10 10 MVGQ 2 2.5

REA/REB

-2-10.)

Slide Tables MX Series

Max. tightening torque ft lbf (N m) Max. screw-in depth L (mm) Max. tightening torque ft lbf (N m) Max. screw-in depth L (mm) Model Model Bolt used Bolt used 6 6.5 0.7 {0.9} 0.7 {0.9} M3 x 0.5 M3 x 0.5 MXF8 MXF8 6 5.5 0.7 {0.9} 0.7 {0.9} M3 x 0.5 M3 x 0.5 MXF12 MXF12 10 6.5 1.5 {2.1} 1.5 {2.1} M4 x 0.7 M4 x 0.7 MXF16 MXF16 12 9.5 3.2 {4.4} 1.5 {4.4} M5 x 0.8 M5 x 0.8 MXF20 MXF20 18 Long

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

20 30 1003 5 10 20 30 50 100 200 50 100 200 Horizontal Vertical (downward) Vertical (upward) m1, m2, m3 max. m1, m2, m3 max.

Manifold Specifications

2-Rc 1/8 (EXH port) Blanking Plate Assembly DXT199-22-1A Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 8 With spring washer Blanking plate Round head combination screw Interface Regulator (P port regulation) Gasket Interface style regulators can be placed on top of the manifold base to reduce the pressure of each of the valves. ( ) M3 x 10 With spring washer

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel