3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)

Ionizer Nozzle type IZN10 Series IZS

150 mm, capacitance: 20 pF) as defined in the U.S.

Digital Flow Switches

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 11 For Water Digital Flow Switch Series PF2W Refer to www.smcworld.com for details of products compatible with overseas standards.

Air Cylinder

M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to

1.63

32 40 MGPWA20-150 0.3 0.3 MGPWA -100 32 40 MGPWA20-100 0.2 0.2 MGPWA -50 32 40 MGPWA20-50 0.1 0.1 0 0 0 20 40 60 0 20 40 60 80 100 Load from lateral direction (N) Load from lateral direction (N) MGPWA25 MGPWA50, 63 0.5 0.5 Plate displacement amount (mm) Plate displacement amount (mm) MGJ 50 63 MGPWA -200 0.4 0.4 MGPWA25-200 JMGP 0.3 0.3 50 63 MGPWA -150 MGPWA25-150 0.2 0.2 MGP 50 63 MGPWA

Table of Contents

Cylinder port is located at U side of body. 3(R) EXH port L n Dimensions Formula L1 = 11n + 15.5, L2 = 11n + 28 n: Station (Maximum 16 stations) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 37.5 50 75 85.5 L1 L2 (L3) (L4) 26.5 39 62.5 73 48.5 61 87.5 98 59.5 72 100 110.5 70.5 83 112.5 123 81.5 94 125 135.5 92.5 105 125 135.5 103.5 116 137.5 148 114.5 127 150 160.5 125.5 138 162.5 173 136.5 149

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L2=16n+22 n: Stations (Max. 20 stations) Dimenisons L n 2 43 54 75 85.5 14 235 246 275 285.5 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 20 331 342 362.5 373 7 123 134 162.5 173 8 139 150 175 185.5 9 155 166 187.5 198 10 171 182 212.5 223 11 187 198 225 235.5 12 203 214 237.5 248 13 219 230 250 260.5 3 59 70 100 110.5 4 75 86 112.5

Table of Contents

11 !2 !33 !4 !5 !

Digital Flow Switches, Series PF2A, Series PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 11 For Water Digital Flow Switch Series PF2W Refer to www.poweraire.com for details of products compatible with overseas standards.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y5-60Stations B 2 3 4 5 6 7 8 Stations 4-One-touch fitting (ports P, R) Applicable tube O.D.: 10 L1 135.5 160.5 173 185.5 210.5 223 235.5 L2 125 150 162.5 175 200 212.5 225 (Station n) (Station 1) 51.9 (4.9) L3 112 128 144 160 176 192 208 (Light/surge voltage suppressor) 43.8 (5.5) L4 11.5 16 14.5 12.5 17.5 15.5 13.5 9 10 11 12 13 14 15 Stations L1 248 273 285.5 298 323 335.5 348 [47.9

Table of Contents

S page 11-3-4.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

ISO Standard Hydraulic Cylinder

16 12 58 107 34 33 70 3/8 58 40 12 19 47 8 22 22 19 50 65 103 M8 x 1 32 64.5 9 M20 x 1.5 25 to 800 11 16 12 58 108 50 42 15 34 59 11 83 3/8 65 24 28 28 25 63 77 115 M8 x 1 38 76.5 9 M27 x 2 25 to 800 11 50 19 31 18 74 12 95 1/2 66 115 68 58 13 36 30 32 36 80 M10 x 1.25 25 to 800 96 147 47.5 95.5 10.5 M33 x 2 14 60 42 17 18 121 1/2 74 133 77 13 80 75 45 41 17 41 45 100 25 to 1000 115 179

15

The bore size is 20, so the maximum load for vertical mounting will be 11 kg. Work load is 5.5 kg < 11 kg. OK The cylinder is mounted in the vertical direction, and the load generates no rolling moment, so there is not restriction.

Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

AZ1000

However under Japanese regulation, only MPa is available in Japan. 40 Specifications 1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min] Flow [L/min] Flow [L/min] 150 kPa 750 kPa 750 kPa Number of needle rotations Number of needle rotations Number of needle rotations 14 PF2M7(-L) Series Flow Rate Characteristics at Negative Pressure (Reference Data) When the PF2M series is used with negative pressure (70 to 0 kPa), the measurable range (warranty range of the specifications

Environment

-LEFS Series Clean Room Specication Model Selection LEFS SeriessPage 76 11-LEFS SeriessPage 522 Selection Procedure Step 1 Check the work loadspeed.

HRL

(including 6 M8 bolts)*7 Weight (dry state)*11 kg Approx. 240 Approx. 260 Approx. 330 *1 Use fluid in condition below as the circulating fluid.