1.63

speed of 200 mm/s.

HRX-OM-X071

9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels

Rubber seal 5 Port Solenoid Valve Series SYJ5000

terminal (D): SYJ5220-D-M5 M8 connector (W0): SYJ5220-W0-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23 23 23 27

LECA6_C

CN1(P.18) 4.2 CN2CN3: LE-CA-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O (P.27) 6.3 (P.24) 17 - 5.

LECP6_C

CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.

7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

SMC Pneumatic Clean Series

-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Series VQ Metal Seal/Rubber Seal Body Ported

Cylinder port is located at U side of body n: Station Max. 16 stations Equation= VQ Dimensions/Side entry connector [FS] (mm) L1=10.5n+14.5 L2=10.5n+25 n L 1 35.5 46 125 135.5 16 15 182.5 193 275 285.5 14 172 182.5 262.5 273 13 161.5 172 250 260.5 12 151 161.5 237.5 248 11 140.5 151 225 235.5 10 130 140.5 212.5 223 9 119.5 130 212.5 223 8 109 119.5 200 210.5 7 98.5 109 187.5 198 6 88 98.5

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

CJ5-S

26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750

CJ5-S

26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750

Secondary Batteries

Bore size 12 16 20 25 Cylinder stroke (mm) 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 350, 400 20, 25 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 400 32 to 63 *Specifications and dimensions for the 90-series are the same as standard products.

REC

MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11 17 19 21 0.3 RHC G 7 11 13 13 0.5 10 10 50 100 200 300 400 (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 MK(2) Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 Clevis style: C, D RS

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VS VFN C6: One-touch fitting for 6 VVQZ200-10A-5 4-14-35 Base Mounted 36 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ15Stations Port size C Grommet (G) (35) 27.5 (11) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3, C4, C6, M5 (5.5) 2-4.5 mounting hole 20 (7.5) (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Manual override 5.5 A 2 A 2 5

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Thermo-chiller

flow, r Power supply: 200 VAC 7 Standard Type Thermo-chiller Water-cooled 200 V Type Series HRS100/150 RoHS How to Order 100 W 20 HRS Cooling capacity Option 100 10 kW 150 15 kW Cooling method Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

Micro Mechanical Valve Series VM1000

Side mounting Panel mounting VM100/Bottom ported only 3 (R) (3 port) Pneumatic indicator 2 (A) 1 (P) Series VM100/200 CAT.ES12-8A a Series VM100/200 Actuator Variations * It is possible to change the actuator assembly and mount to basic type.