Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY XMH-16-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 11 Series XMH, XYH Specifications XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 XMH-16 Model Flange (valve) size 16, CF034 25 40, CF070 50 Valve type Manual type Fluid Inactive gas under vacuum Operating temperature C 5 to 150 Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 5 14 45 80 1.3 x 10-10{1 x 10
Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -
50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 XLG-50-2 70 181 79 31 11 75 52 76 29 9 XLG-63-2 88 206 100 39 11 87 95 70 77 33 9 XLG-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.
Applicable O-ring C15 C15 S 8 9 WX 74 92 Y 18 18 Bore size (mm) 50 63 8-12-20 21 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Stroke Adjusting Unit With adjusting bolt MY1W Bore size Stroke A h E EA MX EB W MTS h Stroke adjusting unit MY TT CY MY1W50/63 MG EC EY CX (mm) DE EA EB 30 32 38 50 57 66 77 EC EY FC 14 14 13 17 17 26 31 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max
500 600 Speed [mm/s] Speed [mm/s] LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 90 50 Lead 4: LEY32C 80 Lead 4: LEY32C 40 42 Horizontal work load [kg] Vertical work load [kg] 70 Lead 8: LEY32B 60 30 40 45 50 Lead 8: LEY32B 21 20 Lead 16: LEY32A 30 20 10 Lead 16: LEY32A 10 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] Graph of Allowable Lateral
CA2 Bore size (mm) Bolt Width across flats Tightening torque (Nm) CS1 32, 40 MB-32-48-C1247 4 5.1 C76 50, 63 5 11 MB-50-48-C1249 MB-80-48AC1251 Foot 80 100 C85 6 25 Others MB-80-48BC1251 C95 CP95 NCM NCA D-X 20Data 6-7-3 4 Square Tube Type Air Cylinder: Standard Type Double Acting, Single Rod Series MB1 32, 40, 50, 63, 80, 100 How to Order MB1 L 32 50 Without auto switch 50 L 32 Y7BW MDB1
CA2 Bore size (mm) Bolt Width across flats Tightening torque (Nm) CS1 32, 40 MB-32-48-C1247 4 5.1 C76 50, 63 5 11 MB-50-48-C1249 MB-80-48AC1251 Foot 80 100 C85 6 25 Others MB-80-48BC1251 C95 CP95 NCM NCA D-X 20Data 6-7-3 4 Square Tube Type Air Cylinder: Standard Type Double Acting, Single Rod Series MB1 32, 40, 50, 63, 80, 100 How to Order MB1 L 32 50 Without auto switch 50 L 32 Y7BW MDB1
Cylinder Speed Chart Bore size Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Enclosure Series Average speed (mm/s) IP65 compatible T kit (Terminal block box) 5 wiring types have been standardized to facilitate easy wiring work and maintenance.
With auto switch Note) 5 stroke (CU16-5D): 14.5 mm Bore size (mm) R T S 33 36 30 36 40 42 Z 46 52 46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting
(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.
+ Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x
Table 8.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70
Z R U 1 100 VAC 50/60 Hz S T 2 200 VAC 50/60 Hz With light/surge voltage suppressor (Non-polar type) 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Power saving circuit is not available for W type.
type: 5 to 150) 1 x 10-6 up to atmospheric pressure Operating pressure (Pa)(abs) Conductance (L/s) Note 1) 14 45 80 160 200 5 1.3 x 10-10 {1 x 10-10} at ambient temperature, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam 3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperature, excluding gas permeation (Standard material: FKM) External Operating time (s) 0.1 0.21 0.24
LAT Speed [mm/s] Work load: Horizontal [kg] Equivalent lead [mm] Stroke [mm] Series Size Page LZ 6 (10) 25 1000 Page 170 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 LEMB Basic type LC3F2 48 11 (20) 1000 Page 170 32 LEMC Cam follower guide type 25 10 1000 Page 170 50, 100, 150, 200,
For 90 rotation Single vane (S): 80 to 100 adjustable Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 180 10 10 22.5 Allowable radial load (N) Size Allowable thrust load (N) Positioning pin hole 20 1 15 40 3 30 50 7 60 Adjustment bolt (A) Adjustment bolt (B) 60 20 80 Single vane (S): 170 to 190 adjustable For 180 rotation 11-5-6 6 Series MSUA Rotary Table:
Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.
0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.
X B 5 S T D. R O D T H R E A D S T D.