IDX-OM-W029

-6 11-3 IDU Series 10-3 10 2 IDX-OM-W029 11 T 11 T T 11-2, 11-3 11-1 1. 2. 3.

10

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

IDX-OM-W028

Specification for Option T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable . 11 2 11 5 How to re-start the operation . 11 2 11 6 Electric circuit . 11 3 Chapter 12 Specification for Option V 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 How to perform maintenance . 12 2 12 4 Electric

IDX-OM-W031

Specification for Option T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable . 11 2 11 5 How to re-start the operation . 11 2 11 6 Electric circuit . 11 3 Chapter 12 Specification for Option V 12 1 Safety instructions . 12 1 12 2 Specifications . 12 2 12 3 How to perform maintenance . 12 3 12 4 Electric

IDX-OM-W032

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 11-6 . 11-3 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-3 12-4 . 12-3 13 13-1 . 13-1 2 IDX-OM-W032 i i i 1 () OFF 3 ON OFF i 1 1 3 IDFA Series i-1 i 1 IDX-OM-W032 i i 2 5 i 2 1 IDFA Series i-2 i 2 IDX-OM-W032 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDFA Series i-2 i 3 IDX-OM-W032 i i 2 6 WARNING !

IP8101 Series

When users definition (USEr) is set, the following 11 data can be set 7.

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-11 pc. (Blanking plate) VV3Z4-50-061-01 (6 stations) VZ415-1G3 pcs. VZ425-1G2 pcs. VVZ400-32A-21 pc.

IDX-OM-V024

Option T .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD . 13

A_HEC-OM-K001

flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 1200 1000 Facility water 25oC Cooling capacity W Facility water 10oC 800 Facility water 35oC 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-9 Cooling capacity (HED005) 2) Heating capacity 1400 1200 Heating capacity W 1000 Facility water 35oC 800 Facility water 10oC 600 Facility water 25oC 400 200 0 0 10 20

HRX-OM-R039

Fig. 8.4-2 Cooling capacity(HRSE018-A-10) 8.4.3 HRSE012-A-20/23-(T) 1600 1600 Ambient Ambient Temperature Temperature 1400 1400 25 35 40 25 35 40 1200 1200 Cooling capacity[W] Cooling capacity[W] 1000 1000 800 800 600 600 400 400 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 60Hz 50Hz The cooling capacity will be reduced by 100W when

NCA1

3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Option) JXC-MA1 Page 606-11 VUSB cable (Option) JXC-MA1-2 Cable length: 3 m Page 606-11 VController setting software (Option) JXC-MA1-1 Page 606-11 PC Provided by customer 559-0 A System Construction/Parallel I/O (JXC73/83) Provided by customer. The connected actuators should be ordered separately. Provided by customer.

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X226 IZN10-G-200-X226 IZN10-G-300-X226 IZN10-G-400-X226 IZN10-G-500-X226 IZN10-G-600-X226 100 IZN10-11 200 300 400 500 600 Recommended supply pressure: 0.05 to 0.15 MPa 459 IZN10 Series Made to Order 2 This product is an individually applicable product. For details about the delivery time and price, please consult with SMC representative.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 0 1 G H 2 position single: VQ415 155.5 105.5 155.5 105.5 42.5 50 42.5 50 Indicator light 23.5 23.5 11 (12.5) 11 (12.5) 2(B) port 4(A) port VQC 5 3 4 2 SQ 9 38 48 A B 38 24.6 10.5 48 11 1 A 4 2 VQ0 3 5 1 14 12 13.5 13.5 30 45 2-5.6 Mounting hole 30 45 VQ4 2-5.6 Mounting hole Manual override 5-Rc 1/

0.4

SOL.A 17 16 () (+) 21 25 24 Gray Red 23 Station 11 13 3 SOL.B () (+) 22 18 23 Black White 24 SOL.A 12 4 () (+) 23 26 Station 12 White None 25 19 22 SOL.B () (+) 24 11 5 21 20 White None 26 COM. 10 9 8 7 6 (+) () 25 COM. M27 female thread (+) () 26 Electrical characteristics Note) Positive COM spec. Negative COM spec.