Ejector Valve Unit Series ZYY/ZYX 1

3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !

MXU

For details, refer to page 8-30-31. 8-3-11

1 Blow Gun Series VMG K
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MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Pressure loss is less than 1%.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Dimension in parentheses shows Q5 (M5 x 0.8). 13-4-11 11 Series ZM For Single Unit/With Valve Basic Type with Switch and Valve ZM1 -K-E H M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4.5 Release flow adjusting needle Release valve Supply valve

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

VZA2000

Nil T F Rc NPTF, NPT G Caution 3 position closed center 3 position exhaust center Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-1 2 Series VZA2000 Dimensions: Body Ported 2 position single: VZA2121-M5 2 position double: VZA2221-M5 2-2.8 mounting hole 2-2.8 Mounting hole Pilot port (A side) M5 x 0.8 Pilot port (A side) Pilot port (B side) 2-2.8

VK300

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note 1) Based on dynamic performance test, JIS B 8374-1981.

ARJ1020F

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 VBA 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 VE VY1 26.1 3 R, NPT 1/8 13.6 18.3 G 26.1 PPA AL 14-4-13

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

ZSE30/ISE30

Data 17.8 8 9.5 11 42.4 34.5 Panel thickness 0.5 to 6 16-2-11 12 Series ZSE30/ISE30 Dimensions Panel fitting dimension 1-pc. mounting Multiple (2 pcs. or more) horizontal mounting MPa PRESSURE MPa PRESSURE MPa PRESSURE OUT OUT OUT SET SET SET 31 x n pcs. + 3.5 x (n pcs. 1) 0 0.4 31 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

XM, XY

x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1 U1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

VXZ

Frequency (Hz) 50 60(53) 18 60 51(44) 12 Model Power source VX3 7.5 6 8 11 9.5 11.5 AC VXZ22 VXA DC 50 80 21 60 67 17 AC VXZ23 VN DC LVC JIS Symbol LVA OUT LVH IN LVD N.O.

CY1

Symbol (mm) 11 Helical insert screw specifications -X168 P HTB Model HTA Aperture dia.

MHL2

Model MHL2-25D MHL2-25D1 MHL2-25D2 70 124 142 88 142 160 48 102 120 100 182 200 150 282 320 196 328 366 38 86 104 12-4-11 12 Series MHL2 Dimensions MHL2-32D Closed J 2-M8 x 1.25 thread depth 11 (Mounting thread) A cross view (Fingers closed) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

VP3145/3165/3185

650 2 3 (OUT EXH) 280 310 330 650 670 670 3 4 1 4 1 2.0 VP3165 1 1 4 1 1 4 1 VP3185 2.8 1 2 1 2 2 For grommet Conduit terminal +0.2 kg 4-10-2 3 Large Size 3 Port Solenoid Valve Rubber Seal Series VP3145/3165/3185 Construction/Internal Pilot As in the figure below, this pilot-operated solenoid valve consists of a compact 3 port solenoid valve as the pilot valve and a large 3 port valve

2/3 Port Valve

510 650 400 540 400 540 400 540 510 650 510 650 590 730 1.7 1.5 2.0 1.5 1.2 1.2 1.0 5.0 2.5 3.0 3.0 3.0 1.7 2.0 0.4 0.2 0.45 0.2 0.2 0.15 0.45 4.5 0.61 11 0.6 0.35 0.75 0.35 0.35 0.3 0.75 1/4 (6A) 0.85 0.9 1.0 0.9 0.55 0.85 1.0 0.35 0.15 0.4 0.15 0.2 0.1 0.4 6 1.05 19 0.55 0.3 0.5 0.35 0.35 0.3 0.5 Water oil air 1.0 Steam 0.5 0.13 0.08 0.15 0.08 0.1 0.08 0.15 8 1.7 31 0.17 0.2 0.2 0.2 0.14

K35-OMW0030

Trouble Shooting . 77 11. Limitations of Use . 79 11-1. Mounting . 79 11-2. Operating . 79 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Motorless LAT LZ LC3F2 Weight Series LEFS25mV6 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Product weight [kg] 2.06 2.20 2.34 2.50 2.62 2.75 2.90 3.05 3.18 3.30 3.46 3.60 3.74 3.88 4.02 4.20 Additional weight with lock [kg] 0.3 Series LEFS32mV7 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 3.40

VFRA3000

1 5 Port Air Operated Valve Series VFRA3000 How to Order SA 02 VFRA3 11 2 VA SA Thread type (Including pilot port) Function VA Nil Rc 2 position single 1 2 3 4 3 position exhaust center F N T 2 position double G NPT NPTF 3 position closed center VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258