4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector assemblies.

MXF

Body tapped Stroke (mm) Model Reed switch D-A9, D-A9V 10 20 30 50 75 100 MXF8 8 Solid state switch D-M9, D-M9V MXF12 12 2-color indication solid state switch D-F9W, D-F9WV MXF16 16 MXF20 20 8-6-1 2 Low Profile Slide Table Series MXF 8, 12, 16, 20 How to Order MXF 12 50 M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

, 16) Note 2) 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 15 75 90 100 110 D-A9l n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 10 75 90

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Modular F.R.L. Unit

33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 75 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Same side 120 75 90 (n 2) 2 (n 4) 2 120 + 50 (n 4) 2 20 + 50 90 + 50 Different sides n = 2 ,4 ,6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 D-B59W n = 2, 3, 4 90 + 50 (n 2) 120 + 50 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6 n = 2, 4, 6, 8 120 90 1 pc. 15 75 Different sides 90 80 35 Same side 100 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

Cylinder with Lock Series MNB

8 52 104 38 16 13 31 9 3 10 83 46 101 91 1/8 40 14 65 63 14 27 to 1000 35 27 11 65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/

RHC

16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500 3000 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Refer to page 10-6-7 for maximum absorbed energy since cushioning ability may in some cases exceed the allowable cushioning ability if the cylinder is used under high speeds and large loads. 0

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Compact Hydraulic Cylinder

M9NW M9PW M9BW M9NA1 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 3-wire (NPN) IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PA1 M9PAV1 3-wire (PNP) 2-wire 4-wire M9BA1 M9BAV1 12 V 5 V, 12 V F79F IC circuit Diagnostic output (2-color indicator) A96V A72 A93V2 A96 A72H A93 A90 Relay PLC IC circuit

Modular F.R.L. Units

12 12 12 12 12 9 Air Combination AC20-B to AC60-B Series AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW AC40-B AC20-B Nq Body size 20 25 30 40 50 55 60 Symbol Description Nil With drain cock J14 Drain guide 1/8 Drain guide 1/4 W15 Drain cock with barb fitting (for 6 x 4 nylon tube) + i Air filter drain port 13 j Lubricator lubricant exhaust port Nil Without drain

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

•

~""" iRR02 , U 10 12 12 21 29.9 46 57 80 91 1.7 3 (ExcePt fOr) U /2,14 13 12 21 29.9 ZPR13 46 57 80 91 3 1.8 1 ,5. C 54 56 ZPR10C I 56 ~PRllII ZPR10 ZPR16U 16 18 12.5 21.5 30.4 46.5 57.5 80.5 91.5 3.5 1.2 C Deep type 54 ZPR13 54 54 mml 54 'y o ' O A ~B Ij G 75 ~ 1 2 10 60 83 94 6 76 2; '" ZPR16D 16 18 15 6 5l 61 84 Z ~6 ~O 75 75 ZPR?S 76 76 76 Apphcable tube mm ZPI!

C95Series

1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 5.5 6.6 9 9 9 12 14 5.5 6.6 9 9 9 12 14 44 48 60 74 78 100 120 44 48 60 74 78 100 120 114 136 167 190 211 237 264 Double clevis style: (D) Clevis pins and cotter pins are included.

Slider Type Ball Screw Drive/11-LEFS Series

1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14

Compact Cylinder with Air Cushion

type mm Bore size (mm) Stroke range (mm) CD hole H10 Shaft d9 CL CD CT CU CW CX CZ L A B 63 107 55 30 to 100 93 14 8 20 30 22 44 8 80 129.5 63.5 40 to 100 111.5 18 10 27 38 28 56 10 100 155 76 L CU CW RR 40 to 100 133 22 13 31 45 32 64 12 CX CZ +0.4 +0.2 0.1 0.3 B + Stroke CL + Stroke A + Stroke Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 L1 N RR Rod

LJ1H

10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean