Aluminum High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 3 68 59 6 116 107 8 148 139 10 180 171 4 84 75 5 100 91 7 132 123 9 164 155 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 2 stations 52 43 20 stations 340 331 532 Manifold specifications 10-SYJ5000 Type 42: Side ported / 10-SS5YJ5-42Stations -01, C6 N7 [ ]: AC Grommet (G) 01 C6 N7 (With built-in One-touch fitting) Air

CJ2

(mm) GB 5 5 GA 14.5 8 8 FZ 32 32 42 FY 14 14 20 FX 24 24 33 FT 1.6 1.6 2.3 FC 4.5 4.5 5.5 FB 13 13 19 F 8 8 8 D 3 4 5 T 3 NN M6 X 1.0 M8 X 1.0 C 14 14 20 S 49 46 47 MM M3 X 0.5 M4 X 0.7 M5 X 0.8 B 12 12 18 NB 7 9.5 9.5 H 28 28 28 A 15 15 15 NA 16 12.5 12.5 Z 77 74 75 Bore 6 10 16 M10 X 1.0 With air cushion/Dimensions not mentioned in the below table are the same as the above table.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

MQQ

(mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to 60 97 10 20 10 to 60 FV FV M 104.5 12 25 10 to 50, 75, 100 124 12 28 10 to 50, 75, 100 B + Stroke L FT FX FZ FX (Dimensions other than A and L are the same as the front flange type.)

MQQ

52 10 A + Stroke 20 10 to 60 55.5 10 2025 10 to 50, 75, 100 62 12 28 10 to 50, 75, 100 68.5 12 Data (Dimensions except A and L are same as rod side flange style.) 10-5-13 13 Series MQQ Dimensions Anti-lateral load type (Through-hole and Both end tapped common): MQQLB 10, 16, 20 H thread effective depth C 2-M5 x 0.8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F I 4-N through

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

CNG

st or more 75 st or more 10 st or more 75 st or more Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-B59W 20 to 74 st 20 to 74 st 15 st or more 75 st or more Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted

REC

13 8 18 15.5 34 26 13 10 41 150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700

VQ7-6/7-8

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS L1 L2 L3 75 86 97 108 141 119 130 152 100 112.5 125 125 162.5 137.5 150 175 110.5 123 135.5 135.5 173 148 160.5 185.5 VS n L L1 L2 L3 13 14 16 17 18 21 22 24 15 19 20 23 163 174 196 207 218 251 262 284 185 229 240 273 VS7 187.5 187.5 212.5 225 237.5 262.5 275 300 200 250 250 287.5 198 198 223 235.5 248 273 285.5 310.5 210.5 260.5 260.5 298 How

VQ7-6/7-8

: VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired connector (M12) (L approx. 500) R1 R2 P 42.5 42.5 42.5 42.5 2-6.5 Mounting hole Indicator light 2

Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 K S T V KS KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L1 41.5 55 55 72.5 L2 61 76 76 99 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57 57 75 80 96 96 101 L1 28 41.5 55 55 72.5 77.5

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5