REA/REB

axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products

REA/REB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 Usable range 10 RHC 10 10 Usable range Usable range 5 5 MK(2) 5 RS Q G 1 0 1 2 3 4 5 6 1 1 2 3 4 5 6 1 0 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 RS H A Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft

Pin Clamp Cylinders

13 18 18 Diamond type Round type 095 9.5 135 13.5 136 13.6 137 13.7 138 13.8 139 13.9 140 14.0 195 19.5 196 19.6 197 19.7 198 19.8 199 19.9 200 20.0 Diamond type 096 9.6 097 9.7 098 9.8 099 9.9 100 10.0 10 10 14 14 20 20 Round type 105 10.5 106 10.6 107 10.7 108 10.8 109 10.9 110 11.0 145 14.5 146 14.6 147 14.7 148 14.8 149 14.9 150 15.0 Diamond type D11 11 15 15 -X 531 C(L)KQG32 Series

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

26 10 8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K NN P S T V W ZZ MM NB IA NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 M8 x

3 Port Air Operated Valve Series SYJA300

4.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 13.5 M3 x 0.5 (A port) A A 13 10 (Pitch) P=10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [51.1] 57.8 50.4 43.9 Refer to page 4-4-61 for dimensions

IDX-OM-W023

M 10-1 . 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS-FG AS-FG AS301FSG, AS311FSG AS401FSG, AS411FSG AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic

RHC

9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65

MG

) 40 50 32 40 10 10 32 5 5 1 1 5 100 10 200 1 10 100 50 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-13 Series MGP Vertical Mounting (Ball bushing bearing) Operating pressure 0.4 MPa MGPL12 to 25 (9) 30 Stroke or Less, V = 400 mm/s (10) Over 30 Stroke, V = 400 mm/s 1 10 0.5 5 25 25 20 Load weight m (kg) Load weight m (kg) 20 16 0.1 1 Courtesy of Steven Engineering, Inc.-230

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-3 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 100 VAC (50 Hz) 110 VAC (60 Hz) 15 kg IDF-TR1000-3 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA Singlephase Singleturn 230 207 190 210 160 9 IDF-TR500-4 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10

MU

10 14 16 DI 17 22 27 32 38 CJ 7 10 10 14 16 DH 11 13 13 17 19 CI 17 22 27 32 38 DF 4 7 10 12 14 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 CF 4 7 10 12 14 DB 23 27 31 37 48 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

Cylinder with Lock Series CNG

(12) 6 201 to 350 20 to 200 4 to 200 38 18 15.5 13 93 1/8 44.5 14 8 12 2 18 5.5 8 5 26 201 to 350 85 10 (12) 9 301 to 400 20 to 300 7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25

CNG

(12) 6 201 to 350 20 to 200 4 to 200 38 18 15.5 13 93 1/8 44.5 14 8 12 2 18 5.5 8 5 26 201 to 350 85 10 (12) 9 301 to 400 20 to 300 7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25

Stopper Cylinder

32 48 M6 x 1 10 40 52.5 M6 x 1 10 50 54 M8 x 1.25 14 Bore size KA KB KC KD KE MIW MIS O1 thread 16 8 4.5 8 10.5 M4 x 0.7 20 10 5 7 10 M5 x 0.8 32 17 7.5 13 16.5 M8 x 1.25 40 22 9.5 13 16.5 M8 x 1.25 50 22 9.5 13 16.5 M8 x 1.25 Stroke KD KC KE O1 thread B + Stroke R R KA KB KE * Dimensions other than those shown above are the same as the drawings above.

VQ4000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A B A A VQC 10 11 13 12 15 14 11 10 12 13 14 15 SQ 9 8 7 6 5 4 3 2 1 0 3 2 1 0 4 5 9 8 7 6 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ0 VQ4 Name of terminal block (LED) Note ADDRESS NO. STATION NO.

EXxx-OMN0037CN

(ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -21No.EX-OMN0037CN-A (2)2 2 010 V05 V020 mA 15 V420 mA AD (ab) AD (

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

VJ10-36-1A-10 . 2 pcs.

MGP

12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5

CNG

Operating Range Auto switch model Bore size (mm) 20 25 32 40 D-C7/C-80 D-C73C/C-80C 8 10 9 10 D-B5/B64 8 10 9 10 D-B59W 13 13 14 14 D-H7, D-H7W H7BAL/H7NF 4 4 4.5 5 D-H7C 7 8.5 9 10 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.) There may be the case it will vary substantially depending on an ambient environment.