Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

CA2

A A B A B A B A B A B A B Hs Hs Hs Hs Ht Hw Hw Hs Hs Ht Hs 40 13.5 0 11.5 12 15 23 8 0 0 0 18 3 15.5 0.5 40 31 38.5 31 38 50 14 0 12 12.5 15.5 23.5 8 0 0 0 18.5 3 16 0.5 43.5 35 42.5 35 43.5 63 18.5 0 16.5 17 20 28 9 0 0 1 23 4 20.5 1.5 85 85.5 93.5 49 42 91 91 93 48 42 50.5 80 22.5 1.5 20.5 21 24 32 11 0 0 3 27 6 24.5 3.5 93.5 94 102 55.5 50 107 107 101.5 54 50 59 100 25.5 2.5 23.5 24 27

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

SQ1000/2000

B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

Table of Contents

Optional specifications ( 2) With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B 176 179 216 218 B 114 156 159 196 198 B 150 153 190 192 B 151 154 191 193 AC20C AC25C AC30C AC40C AC40C-06 14-2-21 22 F.R.L.

Series SV

] SV300(R)-W-02, 03 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 2-4.3 (Mounting hole) M5 x 0.8 (Pilot EXH port) 21 21.5 A B PE 38 46 SMC A B A B B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 6.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.5 58.7 26.5 13.5 11.5 5

5

D-K39 D-K39C D-A5m D-A6m D-A3m D-A3mC D-A44 D-A44C Auto switch model D-G5m D-K59 D-G5NT D-G5mW D-K59W D-G5BA D-G59F D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-B5m D-B64 D-A9m D-A9mV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 9 9 5 5 2.5 2.5 4.5 4.5 2 2 5.5 5.5 3 3 10.5 10.5 0 0 1 1 0 0 50 9.5 8.5 5.5 4.5

Smooth Cylinder/Low Speed Cylinder

D-A73 D-A80 D-F7NT D-A9 D-A9V D-A79W D-P3DW D-P4DW A 6.5 10.5 8.5 11 14 18.5 A 8 12 10 12.5 15.5 20 B 5 7.5 10.5 13.5 18 23 A 12 16 14 16.5 19.5 24 B 9 11.5 14.5 17.5 22 27 A 9 13 11 13.5 16.5 21 B 6 8.5 11.5 14.5 19 24 A 9.5 13.5 11.5 14 17 21.5 B 6.5 9 12 15 19.5 24.5 A 14.5 18.5 16.5 19 22 26.5 B 11.5 14 17 20 24.5 29.5 B 3.5 6 9 12 16.5 21.5 A B A B Bore size 32 40 50 63 80 100 0 2 4.5

Table of Contents

A Model MHS2-16D MHS2-20D MHS2-25D MHS2-32D MHS2-40D MHS2-50D MHS2-63D B C D E F 0.5 5.5 21 24 27 32 38 42 54 11 13 15 18 21 24 32 F 5.4 0.6 M2 x 0.4 (B) 0.8 5.2 C 1 9 M3 x 0.5 D (E) F-F (mm) I G 37.5 44 28 34.5 FZ 6 7 FX 31 38 FY CB 20 22 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10H9 12h9 Model MHS2-50D MHS2-63D CA

CL

21 16 16 18.5 11 11 11 11 11 16 16 18.5 15 17 17 21 21 16 16 18.5 3.1-58 Series CL1 Front Flange/(F) A Lock-up at piston forward B Lock-up at piston backward 40 to 100 With rod boot 120 to 160 With rod boot (mm) Bore (mm) Stroke range (mm) Long stroke range (mm) FT BF FX AL EA A B1 BP BX BY C D FY FZ F B EB FD W/o rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 W/ rod

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

CQ2

12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5 31 33.5 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 9 12 12 12 13.5 17.5 15.5 18 22 25.5 B 14.5 15 17.5 17.5 18 23.5 26 25

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

High Purity Fluoropolymer

C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Urethane Bumper B u #2 Since the guide unit parts are the same as the standard type, refer to pages 8-21-19 to 8-21-21. Magnet i Not required for 80, 100 Stainless steel Snap ring o Resin Wear ring !0 Replacement Parts: Seal Kit Rolled steel Nickel plated 100 is carbon steel Rod end nut !1 Contents Kit no. Bore size (mm) NBR Piston gasket !

SMC Pneumatic Clean Series

19.5 19.5 15.5 14 12 10 8 30.4 104 78 76 76 M6 x 1 depth 11 M5 x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 21.5 15 9 7 M8 x 1.25 depth 14 M6 x 1 depth 11 8 22 27 Series CBM2 10-/1121-/22Cylinder with end lock/ 20, 25, 32, 40 (Head side lock) How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in

Micro Mechanical Valve Series VM1000

F.O.F. 6.5 mm 1.7 mm 4.8 mm 21 N 2 x 3.2 mounting hole Push button (Extended) VZM550-01-32R/B/G/Y Panel mounting hole 38 23 T.T. O.T. P.T. Max. 6 1.5 1.5 23.5 (Pilot exhaust port) M5 x 0.8 18.5 3 Symbol (B) 2 (A) 4 (128.5) VM VM R1 P R2 PE 12 14 (105) 86.5 13.6 13.6 14.7 3 (R2) 1 (P) 5 (R1) VMG B A 35 10.8 35 10.8 17 19.8 VR VR51 0.5 MPa supply 3 13 1.6 18 21 T.T. O.T. P.T.