End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot h l Symbol f e 1 to 50 51 to 100 101 to 150

HRX-OM-X037

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

REC

B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5

MQQ

L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

MQQ

L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

2 15 SMC SMC 34 SYJ Cover diameter 1.6 Cross section 0.34mm2 1 5 P 3 R2 R1 Manual override SX 56 48 4 VK (54.5) VZ VF 51 45 VFR A, B port 22 16 16 SMC 9 9 9 VP7 2-PE port M5 X 0.8 (Not applicable to standard.) 18 18 2.1 5-Rc(PT)1/8,1/4 (P, A, B, R1, R2 port) 2.1 VP4 28 M5 X 0.8 External pilot port (Only external pilot style(R)) VQ 0 1 01 02 L plug connector (L): VQZ225 (R)lLl 0 1 01 02 DIN

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

ZX

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

CRBB-OM00004

Assembly / Disassembly procedure 4.1 With vertical auto switch unit 19 Cross recessed round head screw 2 For D-M9 18 Switch holder 2 For D-M9 Size: 10, 15 17 Cross recessed round head screw 2 3pcs. for size 15 16 Cross recessed round head screw 2 15 Cross recessed round head screw 2 14 Holding block (B) 2 13 Switch block (B) 1 12 Switch block (A) 1 3pcs. for size 15 11 Cross recessed round

Series AP500

C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.

HRX-OM-R016

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

I/O Configurator (NFC version)

(relates to position of the unit within the manifold). : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) Unit No. for IO mapping position. -49No.EX-OMV0017-B (b).

Auto Switch Guide

19 D-A44C DIN terminal RLQ D-A90/A93/A96 D-A90V/A93V/A96V 9-15-20 MLU D-90/97 Grommet Direct D-90A/93A ML1C D-Z73/Z76/Z80 9-15-21 DD-E73A/E76A/E80A 9-15-22 -X Grommet Band D-B59W 9-15-23 2-color indication Grommet Rail D-A79W 9-15-24 20Grommet Tie-rod D-A59W 9-15-25 Data This auto switch can be mounted by tie-rod with using mounting bracket.

CNS

For details, refer to page 9-15-68. Normally closed (NC = b contact), solid state switch (D-Y7G/Y7H type) are also available. For details, refer to page 9-15-42. 9-8-22

HRX-OM-W038

When the temperature of the circulating fluid is set to lower than 10oC, use a 15% aqueous solution of ethylene glycol. Tap water may freeze in the thermo-chiller, leading to malfunction. 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

Rotary Table/

bolt B adjustment amount Adjustment bolt B adjustment amount Adjustment bolt B adjustment amount 90 Rotation 90 Rotation 90 Rotation 15 Rotary Table Series MSQ Clean Series Prevents the particulates generated by the bearings from entering the clean room by vacuuming through the vacuum port on the side of the body.

LX

(3.5) 6 (9) (5) Cable length 2000 2-M3 x 0.5 depth 5 17.5 18.5 10 20 (5) 62 72 (15) 8 5 22 1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for connection cables.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY R 1 3 Allowable moment Series CY B 1 3 Series Variations Guide type Series Page 1 3 Basic type CY B 8-15-6/8-15-24 1 3 Direct mount type CY R 8-15-16/8-15-32 Slider type (Slide bearing) CY1S 8-15-46 Slider type (Ball bushing bearing) CY1L 8-15-58 High precision guide type (Single axis) CY1H 8-15-68 High precision guide type (Double axes) CY1HT 8-15-68 8-15-1 2 Magnetically coupled

MQQ

RR CL + Stroke RR 15 6.5 12 8 6 10 A + Stroke 18 8 16 10 9 16 20 10 20 10 10 20 20 18 36 12 10 25 22 18 36 12 10 28 8 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN MM Rod D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.