XL Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials
ZSE2-0R-15 Air 0 to 101 kPa 3% or less 3% Full span (5 to 40C) 5% Full span (0 to 60C) 12 to 24 VDC (Ripple 10% or less) Open collector 30 V, 80 mA Lights up when ON 17 mA or less (when 24 VDC is ON) 0.2 MPa Fluid Setting pressure range Hysteresis Compact size: 39H x 20W x 15D (except the connecting portion) ZX Temperature characteristics Improved wiring: Connector style Operating voltage
Fluid Set pressure range Hysteresis ZY Air 0 to 101 kPa 3% Full span or less 3% Full span (5 to 40C) 5% Full span (0 to 60C) 12 to 24 VDC (Ripple 10% or less) M5 x 0.8 Note) If not operated within the specified range of pressure and temperature, trouble may be caused. ZQ 1% Full span Accuracy ZF Voltage Port size ZP ZCU AMJ Misc.
VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 30mm, Adjuster: B (Both Sides Adjusters/Shock Absorbers), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 30mm, Adjuster: w/o Adjuster, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 50mm, Adjuster: Both Sides Adjusters/Shock Absorbers, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 50mm, Adjuster: Both Sides Adjusters/Shock Absorbers, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 100mm, Adjuster: w/o Adjuster, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 1 pc.
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 50mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Retracting Stroke End Adjuster/Rubber Stopper, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -