Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: G, Port Size: 1/2, Output Specification: OUT1: PNP; OUT2: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: PNP; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: G, Port Size: 1/2, Output Specification: OUT1: PNP; OUT2: PNP, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

Plug-in Unit

3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 : 12 One-touch fitting 38.7 P=25 65.5 VQ5 VQZ VQD Manual override Indicator light L2 48 L1 6.5 65.5 P=25 A A A B A B A B A B A B 9 A A A A A A A 143 163 74.5 9 B B B B B 10 0.6 m, 1.5 m, 3 m Lead wire length n 1 2 3 4 5 6 7 Stations D-side 8 U-side

Slider Type Ball Screw Drive/11-LEFS Series

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

Environment

PA LEM M U D LEY K Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25

JXCx-OMU0004

(P.50 40 No.JXC-OMU0004-A 8.2 () OUT0 to OUT3 M 8.3 10. (P.50) (1) M 41 No.JXC-OMU0004-A 2 * M (3) () M () ON M 42 No.JXC-OMU0004-A 8.4 1 1 1 1 1 1 1 10.

Cylinder

5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

Bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 12 & 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M

Bore sizes (mm): 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M) +/-0.03

Bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 12 & 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M

Bore sizes (mm): 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M) +/-0.03

CATALOG

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

Table of Contents

A VMG M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M5 x 0.8 M-5ALN-6 M-5ALU-6 M5 x 0.8 Barb Elbow for Nylon Tubing: M-5ALHN-4/-6 Barb Elbow for Soft Tubing: M-5ALHU-3/-4/-6 Effective area (mm2) Weight (g) Width across flats 7 M-5ALHN-4 M-5ALHU-3/-4 Model A B C D M-5ALHN-4 M-5ALHN

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.