Table of Contents

8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3

MY1

50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 EA 10 12 14 17 20 26 E 20 24 29 35 40 52 Model MY1C20 MY1C25 MY1C32 MY1C40 MY1C50 MY1C63 Shock absorber model RB1007 RB1412 RB2015 RB2015 RB2725 RB2725 Stroke adjusting unit With adjusting bolt MY1C16 SMY1C16, #3 (#1 + #3 + #7) For 20 to 63 MY1C Bore size SMY1C Bore size , #3 (#1 + #3 + #8) Low load shock absorber +

MXQ

3 !4 !5 !6 !7 !8 !

MGP

circuit Z80 No 3 wire (NPN) Y59A Y69A 5V 12V IC circuit 3 wire (PNP) Y7PV Y7P P. 60 2 wire Y59B Y69B 12V 3 wire (NPN) Y7NW Y7NWV Solid state switch IC circuit 5V 12V Diagnostic indication (2 color indicator) Relay, PLC Grommet Yes 24V 3 wire (PNP) Y7PW P. 61 Y7PWV Y7BW Y7BWV 12V Water resistant (2 color indicator) Y7BA 2 wire P. 62 Note 3) Magnetic field resistant (2 color indicator

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

Electric Actuator/Slider Type

3 !

VQ4000

VQ 4 1 0 0 0 5 Lead wire kit with cable (3 m) Enclosure Series VV5Q41-05C8LD2 1 set VQ4100-52 sets VQ4200-52 sets VQ4300-5 1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

3 Port Air Operated Valve Series SYJA300 1

31.5 VR 74 60 2 52 31 VH 9 119.5 (Piping port) Rc 3/8, 1/2 VHS 42 31 9 3(R) 1(P) 3.5 108.5 (Breathing port) M5 x 0.8 A B Body ported: VPA742V41 31.5 NC NO 2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 6 6 6 6 7 7 10 12 11 14 20 53 53 53 60 67 67 74 74 3 10 10 10 10 17.5 17.5 20 20 15 7 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53 63.5 75.5 75.5 95 95 118 123.5 125.5 144 169.5 169.5 202.5 206 38.5 22 3.5 15 7 36 49 45 25 3.5 16 8 44 58 54.5 30 4 16.5 8.5 54 71 70.5 40 5 22 11 66 86 2-TD8 (Pin O.D.)

CNG

[Horizontal] W 3 ports normally open SOL.C SOL.B Regulator with relief function SOL.A 3 ports normally closed Cylinder internal resistance N 24.6 Cam operating torque (standard) Nm 1.0 Max. cam operating torque Nm 2.3 Applicable hex. wrench size Bore size (mm) 20 Size 3 25 38.2 2.5 Size 3 4.7 2.

Table of Contents

3 !4 !

Rotary Actuator/Vane Type

D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

ZR

1/2 EXH port 3 3 1.5 1 2.5 1.5 1 2.5 7.5 7.5 Pilot valve supply pressure port Common exhaust port 4.5 4.5 Rc 1/8 PV port Air supply pressure port 2-M5 PS port Common pilot supply port 2-Rc 1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit

C95

3 to !

CM2

3 !4 !5 !6 !7 !8 !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Load voltage Auto switch model Lead wire length (m) Indicator light Electrical entry Wiring (Output) Pre-wired connector Applicable load DC Type Special function 0.5 (Nil) 1 (M) 3 (L) 5 (Z) AC M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed auto switch Solid state auto switch IC 5 V, 12 V

CNG

[Horizontal] W 3 port Normally open SOL.C SOL.B Regulator with relief function SOL.A 3 port Normally closed 2.

Cylinder with Lock Series CNG

112 1/8 65.5 26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M MM NA PG PH PL S LC LD LS LH LT LX LZ X Y W XA XB 117 (125) 141 (149) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 127 (135) 151 (159) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 128 (136) 154 (162) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28

•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .