Elbow fitting assembly (Upward) L4: 4 elbow fitting assembly L6: 6 elbow fitting assembly 4 position dual 3 port valve: N.C./N.C. 4(A) 2(B) A A 4 Back pressure check valve B 2 1(P) 5(EA) 3(EB) Nil K None 4 position dual 3 port valve: N.O./N.O.
L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 60 Model Selection (11-)LEFG Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor Clean Room Specification * This graph shows the amount of allowable
P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.
(for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35 J kit: Flat cable 1 to 8 stations SQ230 SQ231 Option SS5Q23 580 Note 2) L4 (for 4) Built-in Silencer Direct exhaust C6 (for 6) Top C8 (for 8) Note 1) One-touch fittings for inch sizes are also available.
Piping: 42 (Base Mounted), Stations: 20 Stations, A, B Port: 01N (NPT1/8)
This is a legacy product, and replaced byVT307-5DO1-01N-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.34012 lb
This is a legacy product, and replaced byVT307-5DZ1-01N, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .39600 lb
VFS2000, body ported and base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm2, Ambient and fluid temperature: -10 to 60 C, Manual override: non locking push style, VFS2200-5FZ-01N, VALVE, VFS2000 SOL VALVE 4/5 PORT, NE, VFS2000 BASE MT 1/8, 1.03617 lb
This is a legacy product, and replaced byVT307-5G1-01N-F, VALVE, SOL 24VDC, VALVE, VT3/VO3 SOL VALVE 3-PORT, PA, VT3 BASE MT 1/4, .35486 lb
This is a legacy product, and replaced byVT307-6G1-01N, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.308 lb
This is a legacy product, and replaced byVXA2130-01N-1
This is a legacy product, and replaced byVK3140-BD-01N, VALVE SOL 24VAC, VALVE, VK3000 SOL VALVE 4/5 PORT, ND, VK3000 BASE MT 1/8, .00000 lb
Piping: 41 (Base Mounted), Stations: 5 Stations, A, B Port: 01N (NPT1/8)
Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: 01N (NPT 1/8)
Piping: 41 (Base Mounted), Stations: 9 Stations, A, B Port: 01N (NPT1/8)
Piping: 40 (Base Mounted), Stations: 9 Stations, A, B Port: 01N (NPT1/8)
Piping: 40 (Base Mounted), Stations: 3 Stations, A, B Port: 01N (NPT1/8)
Piping: 40 (Base Mounted), Stations: 4 Stations, A, B Port: 01N (NPT1/8)
Piping: 40 (Base Mounted), Stations: 5 Stations, A, B Port: 01N (NPT1/8)
Piping: 40 (Base Mounted), Stations: 6 Stations, A, B Port: 01N (NPT1/8)