Body Size: 30, Thread: N (NPT), Port: 02 (1/4), Option: C [Float Type Auto Drain (N.C.)], Attachment: S (Pressure Switch), Semi-Standard 1: 3 (Lubricator w/Drain Cock), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 30, Thread: N (NPT), Port: 02 (1/4), Option: D [Float Type Auto Drain (N.O.)], Attachment: S (Pressure Switch), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 30, Thread: N (NPT), Port: 02 (1/4), Option: CG (C + G), Attachment: S (Pressure Switch), Semi-Standard 1: 3 (Lubricator w/Drain Cock), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

CJ2

(mm) MM NA ND h8 NN S T Z Bore A B C D F GA H 6 15 12 14 3 8 14.5 28 M3 X 0.5 16 6 M6 X 1.0 61 (66) 3 117 (122) 0 0.018 0 0.022 10 0 0.022 ( ) in S or Z dimensions: With auto switch With air cushion/Dimensions not mentioned in the below table are the same as the above table. 10 16 15 12 14 4 8 8 28 M4 X 0.7 12.5 8 M8 X 1.0 49 105 15 18 20 5 8 8 28 M5 X 0.8 12.5 M10 X 1.0 50 106 B C GA NA

A

H O W T O O R D E R C H E C K VA LV E S E R I E S (N)AKM D I M E N S I O N S C H E C K VA LV E S E R I E S NAKM S Y M B O L S (N)AKM Japanese N North American P O R T S I Z E B O D Y S I Z E 01 18 02 14 03 38 20002000 Series 30003000 Series 40004000 Series P O R T T H R E A D mm Rc(PT)* Remove (N) when ordering N NPT Model Port Size A B C D E NAKM2000 18 14 40 40 28 11 11 NAKM3000 18 14

Table of Contents

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQS CQM CQ2 RQ MU D-X 20Data 7-6-131 132 Compact Cylinder: Anti-lateral Load Type Double Acting, Single Rod Series CQ2 32, 40, 50, 63, 80, 100 How to Order Without auto switch CQ2 B S 32 30 D C F9BW S CDQ2 B S 32 30 D C With auto switch Built-in magnet Number of auto switches Auto switch Mounting style Nil Without auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.

Proposals for Energy Saving

Class H G C D, T G, C S T Note) S L, Z S L, Z Thread AC Flange DC Note) Surge voltage suppressor is attached to the lead wire.

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

CXS

with depth 12 2-M5 x 0.8 with depth 7.5 0.2 60 12 S SS ZZ Z Part no.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

CQ2

20 30 D Standard A73 S B 20 30 D CDQ2W With auto switch Number of auto switches With auto switch (Built-in magnet) 2 1 n S n Auto switch Mounting Without auto switch (Built-in magnet) Through-hole (standard) Both ends tapped L F Foot Flange B A Refer to table below for auto switch model No.

Free Mount Cylinder

4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc1/8 Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x

Rotary Actuator/Vane Type

S E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

MGP

WA L DL X 0.02 X 0.02 T R X 0.02 X DA VB VA H 24 11 PW X U DB End lock mechanism ( ) non-locking type manual release XAH7 depth XL GC 2-P (plug) 2-P Q GA LL GB PB J K WB WA Z G PA + Stroke C + Stroke B + Stroke A + Stroke XAH7 depth XL FA FB S XAH7 depth XL HR E b a With front lock XAH7 c d e MO T-slot dimensions XB (mm) DM HN XAH7 XC XL Bore size (mm) a b c d e End lock mechanism (Locking

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs.

CM2

S ZZ Z Z S S Z S S ZZ ZZ ZZ ZZ Z 20 6 21.5 25 20 158 112 143 183 133 137 87 168 193 6 24.5 32 25 162 112 147 187 137 137 87 172 197 6 27 40 32 164 114 149 189 139 139 89 174 199 164 214 224 8 32.5 40 138 179 168.5 163 113 204 229 188 243.5 254 193.5 218.5 213 268.5 279 6-4-49 50 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S T Spring return S + Stroke Z + Stroke ZZ +

REA/REB

Speed 600 mm/s E(h8) E(h8) X D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25

REA/REB

increased (Maximum speed: 600 mm/s) RE A B Series REB introduced with a maximum speed of 600 mm/s.