10C)2.5(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Rate) Seal material Leakage rate Operating fluid temperature (C) Solenoid valve option (symbol) Ambient temperature (C) Note) Non-leak, Medium vacuum 106 Pam3/sec or less Power source Air Nil, G V, M 10 Note) to 60 10 Note) to 40 1 cm3/min or less NBR, FKM 10 Note) to 80 10 Note) to 60 20 to 60 20 to 40 AC DC Note) Value on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C

VXD21/22/23

VXD21 DC AC VXD22 DC AC VXD23 DC 5 4 7 6 9 8 Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C

VXP21/22/23

45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C

10C)2.5(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)3.4(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.715/22Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)3.4(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.715/22Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Stations: 9 Stations, Port Size: N3 (5/32" One-touch Fitting), Cable Length: 0 (w/o Cable 25 Pin), Option 1: D (DIN Rail Mounting), Option 2: RT (External Pilot, Branched P & R Ports on U Side)

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m), Bracket/Panel Mount: A2 (Bracket B, Horizontal Mounting), Sensor Connector: C (Sensor Connector, for

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Not available for S/SQ kit) rt D-side end plate assembly no. y U-side end plate assembly no.

Aluminum High Vacuum Angle Valve

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13 sec. Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C, it is 2.8 x 10-8 sec, or about 200 times shorter. The objective of baking is to exhaust water with long adsorption residence time more quickly.

High Vacuum Angle Valve

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13 sec. Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C, it is 2.8 x 10-8 sec, or about 200 times shorter. The objective of baking is to exhaust water with long adsorption residence time more quickly.

REA/REB

2 rt ew u y !3!4 i o q !7 !6 !9 !8 @8 #2 #0 #1 #3 #4 Component Parts Material No. Description No. Description Material Note Note Stainless steel Nickel plated Carbon steel Lock nut B Cylinder tube q !8 Aluminum alloy Hard anodized Aluminum alloy Plate A External slider tube w !

25

Ionizer Emitter cartridge One-touch fitting End bracket Intermediate bracket Feedback sensor u 1 2 3 4 5 6 7 8 9 w IZS41/42 series i rt q e o Auto balance sensor [High accuracy type] Power supply cable (for IZS40) Power supply cable (for IZS41/42) w 425 IZS40/41/42 Series Accessories (for Individual Parts) Feedback sensor IZS31-DF Auto balance sensor [High accuracy type] IZS31-DG Power supply

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Not available for S/SQ kit) rt D-side end plate assembly no. y U-side end plate assembly no.

EXxx-OMQ0015CN

(M)/ :(26 ) -17No.EX-OMQ0015CN PROFINET PLCOFF PLC SF PLC EX600 BF PLCOFF PLCSI PLC SI PLC SI Device Name BF SI Node flashing test SF BUS IN No Link / No Activity BUS IN Link / No Activity () BUS IN Link / Activity BUS OUT No Link / No Activity BUS OUT Link / No Activity () BUS OUT Link / Activity :(26 ) -18No.EX-OMQ0015CN EX600-SPN1 EX600-SPN2 PROFINET IO(PROFINET RT