Speed Controller with Indicator

5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0 @6 q i r 2a 3a @0 @3 !5 @7 !7 o u y @5 t @8 !2 !3 !8 @2 !9 With switch rail Component Parts No. Description Note Material No.

LX Series Compact Electric Actuators

l-en load,o f * t__i-r i l u i I I I l ; l 5 t 6 t i ] F ? {C $mies L)(P tleslric Actrfllor$ It|odd $slediru ltleiludl Operating conditions when LXP is used as lifter Working fange to linear bail bearing. Use within allowable thrust. Lateral load allowance zoo T---*J-rf I I T---r -tl l r ) = _ 1 ) , 4 \ t l 1 -;-) 50 to 100 stroke 75 | 2.47 1oo I zJt 125 1 5 0 ' , , e 1'rC ' "; ?

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

Smooth Cylinder/Low Speed Cylinder

K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 8 9 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note ) Threaded through hole is

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

CG5-S

q o i r y t !

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.

MGP

8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

5 Port Solenoid Valve, Series VQC

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP X 1 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

Secondary Batteries

*Port sizes of X, PE port for external pilot specifications (R) are 4 mm or 5/32 inch.

MGP

dimensions 6H7 depth 10 b a X 0.02 c d X 6H7 e 7 (mm) e 22.5 30 Bore size (mm) 80 100 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 6H7 5 10 Section XX Section XX detail WB WA Z Section XX 4-MM depth ML Bottom view HA: T-slot for hexagon bolt 4-OA through L Z WA 4-NN through 4-OB depth of counter bore 8 Section XX X 0.02 X 0.02 DA VB VA R H U T X PW DB 6H7 depth 10 GC 6H7 depth 10 2-Rc 3/8 PB

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

air-filter-e

(Nominal) e AMD800 AMD810 AMD801 AMD811 AMD900 AMD910 AMD901 AMD9111 AMD1000 AMD1010 AL-61S 1 1 1 1 AL-61S 1 OD112XID90XT3 t AL-60S 1 1 1 AL-60S 1 KA00061 63174 63148 u 3 3 3 3 AL-63S 1 AL-63S OD112XID90XT3 (1A-G35) Element r 3 3 3 AL-62S 1 AL-62S e 5 5 5 5 AL-31S 1 AL-31S OD112XID90XT3 Drain 248 Micro Mist Separator with Pre-filter Series AMH Construction AMH150C to AMH550C, AMH650 AMH850

Air Preparation Equipment

(Nominal) e AMD800 AMD810 AMD801 AMD811 AMD900 AMD910 AMD901 AMD9111 AMD1000 AMD1010 AL-61S 1 1 1 1 AL-61S 1 OD112XID90XT3 t AL-60S 1 1 1 AL-60S 1 KA00061 63174 63148 u 3 3 3 3 AL-63S 1 AL-63S OD112XID90XT3 (1A-G35) Element r 3 3 3 AL-62S 1 AL-62S e 5 5 5 5 AL-31S 1 AL-31S OD112XID90XT3 Drain 248 Micro Mist Separator with Pre-filter Series AMH Construction AMH150C to AMH550C, AMH650 AMH850

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

Speed Controller with One-touch Fitting

0 q r !2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !