Possible to transfer a workpiece at low-speed.

Thread type Size 10, 15 Port type Nil Nil TF TN TT Combination 4 Types Combination of Applicable Chart How to order model with auto switches M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 C 8 -X 6 -X 6 C 7 C10 C11 A 2 A24 C 7 A 1 A 2 A14 Chart 1, 2, 5 Chart 1, 2 Chart 2, 5 Rotating angle Refer to page 308 for How to Orderproducts with auto switch. 20, 30, 40 90 180 80 to 100 170 to 190 Combination is

ZR

Arrangement (Right valve station which is looked from valve side is first station.) 06 B Both sides 6 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 1 1 station only 1 station only 6 6 6 stations only 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 4 +0.030 0 29.5 (Extension end adjuster) 10 Bottom view of MXQ12L-40 13228.5 J I 5.5 10 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 Max. 13 (Retraction end adjuster) 4H9 ( ) depth 4 +0.030 0 9 39 29 4H9 ( ) depth 4 +0.030 0 5 HA GA A B NN x M5 x 0.8 thread depth 10 9 8.5 9 4.2 4.2 A B 16 8 16 8 G (NN 1) x H H B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

79 Series CY1H Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range Piping port surface Bore size (mm) Auto switch model Cylinder model 10 15 20 25 32 D-Z7/Z80 8 6 6 6 CY1H D-Y5/Y6/Y7 6 5 5 5 D-Z7/Z80 6 9 A B CY1HT D-Y5/Y6/Y7 5 6 Some switches cannot be mounted.

MGP

For M5 After tightening by hand, tighten an extra 1/6 to 1/4 rotation with a tightening tool. 2. For taper thread Use the correct tightening torques listed below.

Rotary Actuator

4, @5, @6, #3, $6 are included as a set. u, o, !0, !4, @5, @6, #3, #6 are included as a set. u, o, !0, !4, @5, @6, #3 are included as a set. Corresponding parts Note) When ordering replacement parts, write 1 for one set of the parts per actuator. A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Note 1) M5 and U10/32 type: Stainless steel 603 Series AS1F-T Construction L5 D3 Elbow type H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size A d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 Model Weight (g) Model Weight (g) d T H D1 D2 D3 L1 L2 L3 L4 L5 M1 AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 3.2 8.4 12.7 17.3 22.1 12.7 12.3 12.3 AS121F-M5

Electric Actuator/Slider Type

7 A @7 !0 !6 A @6 !1o !5 @5 @4 !4 w A-A Motor bottom mounting type is the same. Component Parts No. Description Material Note No.

SMC

Insert) 12 6 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 x 0.8 thread depth 5.5 10 21 5.5 K Vacuum suction port M5 x 0.8 10 5.5 5.5 9.5 12 12 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 6 5.5 12 Operating port 2-M5 x 0.8 11 3 5H9 depth 4 +0.030 0 2-M5 x 0.8 thread depth 5.5 GA HA B A 5H9 depth

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

S 20 20 stations A,B port side R1,R2 Port M5T M5 0.8 M5 0.8 R1,R2 Port M5 0.8 N3T One-touch fitting A, B Port M5 0.8,N3T P Port NPTF P Port NPTF A, B Port M5 0.8,N3T How To Order: Flat Ribbon Cable Manifold Type 21P (4 Port/Body Ported Type) Applicable valve: SYJ3 23 LOU --M3 SYJ3 23Y LOU --M3 5 6 5 6 AB Port M3 0.5 SS5YJ3--21P-07 00T Applicable connector ass'y: SY3000-37-28A (For 2

42

) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

tubing O.D.: 6 24 13.3 16.2 34 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 X P 1 A 4 One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 24 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 A A 4 A 4 A 4 A 4 A 4 P 1 One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 M5 x 0.8 [4(A), 2(B) port] (L4) L3 SI unit (3.2) 101.2 8 3.1 18 28.8 36.3 58.2 3.5 5.5 35

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

20 15 5 A A B B 20 1 5 15 (Pitch) P = 10.5 M5 x 0.8 (A, B port) A A 17.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 18 1.5 SS5YJ3-32, S32Stations -M5 Station n L1 L2 Station 2 41.5 33.5 Station 20 230.5 222.5 3 52 44 4 62.5 54.5 5 73 65 6 83.5 75.5 7 94 86 8 104.5 96.5 9 115 107 10 125.5 117.5 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

6 w !7 !1 !0 !6 w !7 !1 !0 !5 w !7 !0 o !2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q2 = M 6. (mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS