Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS321F-02 AS331F-02 R1/4 AS321F-03 AS331F-03 R3/8 AS421F-04 AS431F-04 R1/2 Note 1) AS121F-M5-02 applicable cylinder bore sizes are 2.5, 4, 6.

Plug-in/Plug Lead: Single Unit

For replacement parts, refer to page 2-6-43. 2-6-31 Base Mounted Series VQ5000 Kit (Connector) C 61.8 2-Rc 1/8 (Pilot EXH port) 29.5 29.5 12 21 47.5 PE R2 5 R1 3 1 P SMC 6-Rc 3/4 1(P), 5(R1), 3(R2) port 133 106 46.8 9 9 59.2 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port Manual override B 2 A 4 6 Indicator light B 2 A 4 A B SMC SMC SMC SMC SMC 5 A B B B B B

Base Mounted Metal Seal/Rubber Seal Series VQ

KQ2P-04 KQ2P-06 KQ2P-08 4 6 8 16 18 20.5 32 35 39 6 8 10 When ordering a plug incorporated with a manifold, indicate CM for the port size in the manifold no., as well as, the mounting position and number of stations and cylinder port mounting positions, A and B, in the manifold specification sheet.

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

New

04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring is shipped together with the product, but not assembled. 10 Series VXF2 Dimensions: Direct piping type VXF21A<<A A B B D C D C J J K I K

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

HRX-OM-W058

reference . 9-2 9.1.3 Communication specifications . 9-3 9.2 Outline dimensions . 9-5 9.3 Flow Chart . 9-6 9.3.1 HRS018/030-A-20-R . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS018-A-20--R . 9-7 9.4.2 HRS030-A-20--R . 9-7 9.5 Heating capacity . 9-8 9.5.1 HRS018-A-20-R, HRS030-A-20-R . 9-8 9.6 Pump capacity. 9-9 9.6.1 HRS018-A-20-R, HRS030-A-20-R . 9-9 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R .

HRX-OM-X027

Inset the signal cable through the hole and fit the nipple A, nipple B and lock nut. Then fit the cap A, cap B and rubber bushing. Recommended cable diameter: 6 to 13 mm Signal cable entry For option B Signal cable entry Lock nut Nipple A Rubber bush Nipple B Cap B Cap A Fig. 3-9 Mounting to the cable gland Fit the nipple A and nipple B closely until it clicks.

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

VQ7-6/7-8

) 2 position/Double : VQ7-6-FG-D-SC Double (reverse pressure): VQ7-6-YZ-D-SC 3 position/Closed center : VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired

HRX-OM-R039

-A-10, HRSE018-A-10) 8.5.2 HRSE012/018/024-A-20/23 0.14 14 0.12 12 Circulating fluid pressure [MPa] Outlet : 60Hz 10 0.10 Pump head [m] 8 0.08 Outlet : 50Hz 0.06 6 0.04 4 Available area Return port 0.02 2 0.00 0 2 4 6 8 10 12 14 16 Circulating fluid flow [L/min] Fig. 8.5-2 Pump capacity (HRSE012-A-20/23, HRSE018-A-20/23, HRSE024-A-20/23) HRSE Series Product Warranty 8-9 HRX-OM-R039 Chapter

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-10SD ASD630F-04-12SD 4 9.3 29.4 17.5 12.9 8 9.6 10 4.7 11.7 30.7 31 0.7 27.4 7.8 M5 x 0.8 6 11.6 32.5 20.6 13.7 18 6 11.6 14 38.5 22.9 38.9 13.7 36 12 14.2 11.8 7.2 34.7 1.2 31.6 10.6 R 1/8 8 15.2 15.8 44.8 28.2 38.2 18.5 38 6 12.8 43.5 25.2 17 72 18 8 17 15.2 18.5 15 7.2 46.5 28.2 41.7 40.2 1.2 34.7 11 18.5 R 1/4 74 10 18.5 19.7 49.3 31 21 77 6 12.8 48.3 25.2 17 107 20.3 8 15.2 51.3 28.2

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS1002FS-23 3.2 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 36.4 33.9 11 15.4 8.8 10.1 13.5 13.6 15.1 5.5 9.6 5.2 AS1002FS-04 4 9.3 7.7 10 37.6 5.5 AS1002FS-06 6 11.6 9.7 12 40.1 6.1 12.8 37.4 34.9 12.3 6.6 AS2002FS-04 4 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 44.5 43 12.6 17 10.5 12.3 13.5 20 21.5 6.5 15 9.5 AS2002FS-06 6 11.6 9.7 12 43.1 10.4 AS2052FS-06 6 12.8 11.5 4.3 7.8 13 16 54.2 7.6

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

VQ7-6/7-8

double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

VQ7-6/7-8

4, 3/8 25 25 9 Y(PE) port 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 VFN 2 position double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

6 6 6 6 6 10 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50

Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.