Hand Valve Series VH

VH422-02 to 06 VH432-02 to 06 N Flow direction 2(A) Flow direction 4(B) Flow direction 2(A) Flow direction 4(B) 90 45 45 Rc3/4: 185(10.2) 1 2 9.7 VH6 VH600-06, 10 3 (Closed center) 3/4, 1 Rc1: 194(10.5) 3 4 3.6-6 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R Standard (Opposite to handle side) Handle side Body size (Base size) Port size (nominal size) 2 3 4 6 1/4 base

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

B A B A B A B A B HS HS HS CP95 20 9 3 6 8 4.5 24.5 27 27.5 20.5 15.5 17.5 19.5 16 25 9 3 6 8 4.5 27 29.5 30 20.5 15.5 17.5 19.5 16 NCM 32 10 4 7 9 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 17 40 14.5 8.5 11.5 13.5 10 35 37.5 38 23.5 19 20.5 22.5 19 NCA 50 17 11 14 16 12.5 40.5 43 43.5 28.5 22.5 25.5 27.5 24 63 17 11 14 16 12.5 47.5 50 50.5 28.5 22.5 25.5 27.5 24 DOperating Range -X Auto switch

Series SV

One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 6 N7 Rc 1/4, 3/8 [4(A), 2(B) port] L3 (L4) U side D side L5 47.3 4-6.2 (for mounting) (5.4) [for Rc 1/4, 3/8] DIN rail holding screw (for DIN rail mounting) 13.3 81.7 75 B B B B B 8 164.7 148.2 5.5 35 A A A A A 98.2 A B A B 1 2 3 4 5 6 7 8 9 10 11 12 13 14

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Series AP500

Short type 7) Code FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8 02 No code P SC Sub-atmospheric(A):100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 06 10 15 6) Panel mounting hole: 1.56 inch (39.6 mm). 7) Bonnet port is not threaded.

5 Port Solenoid Valve SY Series

Refer to How to Order Port Block Assembly on page 6. M5 port block assembly Pilot valve assembly A Bracket Assembly No. B Description No. Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Description Material Note 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Knob POM 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 O-ring NBR 8 O-ring NBR 9 Cassette 10 Seal NBR 11 Bonnet A POM 12 Bonnet B POM 13 Gear POM 14 Indicator gear POM 15 Clip Stainless steel 16 Gasket NBR/Stainless steel q t r u i !6 !

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Series AK1000

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

Soft Start-up Valve AV2000/3000/4000/5000 1

16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4,

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

CYPSeries

When a cylinder is used in a clamping mechanism, there is a danger of work pieces dropping if there is a decrease in clamping force due to a drop in circuit pressure caused by a power outage, etc. Therefore, safety equipment should be installed to prevent damage to machinery and/or human injury. Suspension mechanisms and lifting devices also require consideration for drop prevention. 6.

CYPSeries

When a cylinder is used in a clamping mechanism, there is a danger of work pieces dropping if there is a decrease in clamping force due to a drop in circuit pressure caused by a power outage, etc. Therefore, safety equipment should be installed to prevent damage to machinery and/or human injury. Suspension mechanisms and lifting devices also require consideration for drop prevention. 6.

CYP

When a cylinder is used in a clamping mechanism, there is a danger of work pieces dropping if there is a decrease in clamping force due to a drop in circuit pressure caused by a power outage, etc. Therefore, safety equipment should be installed to prevent damage to machinery and/or human injury. Suspension mechanisms and lifting devices also require consideration for drop prevention. 6.