Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

B ZY 2.5 A ZQ B With a stroke of 10 mm Dimensions: 10 mm Stroke (mm) ZF Model A B C D F Y H I J K K Q: 4 Q: 6 ZP ZPT10F10-0-A10 10 12 10 12.5 27 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 13 15 Rc 1/8 ZCU 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 16 18 M14 x 1 Additional Dimensions by Stroke (mm) AMJ 6.2 Hexagon width across flats 19 Misc.

Vacuum Pad: Ball Joint Type

Note that sometimes a load is applied to the buffer by a piping tube (pulling or pressing, etc. in a lateral direction). 5. Do not apply an impact or large force to a pad when adsorbing a workpiece. This will cause deformation, cracking and wear of the pad to be accelerated. The stiffening ribs, etc. should touch lightly, while staying within the pad skirts deformation range.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

B 3 2 A B Dimensions/10mm stroke A (mm) B With a stroke of 10mm C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5 39 75 2 ZPT16F10-B5-A10 16 18 Rc(PT)1/8 Width across flats 13 Additional dimensions by stroke (mm) H I J Stroke M14 x 1 20 +10 +38 6.2 +28 Width across flats 19 30 +20 +48 40 +30 +84 5 5 D C +54 50 +40 +94 I J Width across

Free Mount Cylinder

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates a surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 7.

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

V100 SY SYJ Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 Dimensions VK L (mm) A Applicable fittings fitting d Model A L D VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 16 16 18 20.5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

D-Y69l D-Y7P D-Y7PV D-Y7lW D-Y7lWV D-Y7BA D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-B5l D-B64 D-A9l D-A9lV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

10

Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3

Speed Controller with One-touch Fittings

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

MGG

A A A A A A B B 16 (23) B 21 (29) B B 18 (26) B B 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 20 27.5 27.5 27 24.5 25.5 27 28.5 27 24 30.5 29.5 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 16 (23) 21 (29) 18 (26) 25 30 30 29.5 27 25.5 27 28.5 27 24 30.5 29.5 22.5 (30.5) 21.5 (29.5) 20.5 (28.5) 17.5 (25.5) 16 (24) 22 (30) 19 (27) 32 33.5 33.5 33 30.5 26.5 28 29.5 28 25 31.5 30.5 24.5

Cylinder with Lock

: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 46 CP96N/C96N Series Symbol Change of Rod End Shape 1 -XA0 to XA30 Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol

MNB

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

] for AC Grommet (G) L2 L1 5 53.5 1.5 10.5 19.5 3.4 23 8 25.4 R P R P 48.4 (DIN 49.7) A A A A 39 70.6 [72.8] 2 x 5.5 (For mounting) 1/8 (P, R port) 1/8 (A port) (Pitch) P=19 20 Manual override Approx. 300 (Lead wire length) 57 [64] (Station n) (Station 1) (Light/surge voltage suppressor) + + + + 41.6 25 L plug connector (L) M plug connector (M) DIN terminal (D, Y) M8 connector (WO) 53.5 53.5

A_HEC-OM-J017

Problem Cause Solution Connect the host and the thermocon with the following cables: A wrong connecting cable is used. A cross cable for RS-232C A straight cable for RS-485 Make the following settings of the host and the thermo-con consistent: The settings of the host and thermo-con are not consistent with each others.

SYJ300/500/700

23 23 23 27 Refer page 4-4-61 for dimensions with connector cable. 4-4-22 23 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Base Mounted (With sub-plate) [ ] for AC Grommet (G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 V100 SY 2-4.5 (For mounting) 4 34 SYJ Manual override A VK 24 P R VZ 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) Courtesy of Steven Engineering, Inc

Cylinder with Lock

C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 36 MWB Series Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 DA MM DA MM MM MM 30 30 H AL A H L A H AL H AL L K LB K Symbol: A28 Symbol: A29

Table of Contents - Tubing

Note 3) The value at a temperature of 20C, with a 10% or less O.D. variable rate.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. Note 3) With a low number of operating cycles, even a valve with a small Cv factor can be operated.