VP4

VFR VP450 VP470 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 82 (3 position: 98.5) 129 VZS 71(95.5) VFS 139.5 B A B A VS4 VQ7 (External pilot port) 1/8 (External pilot port) 1/8 EVS VFN A B B A B B B A EA P EB P EA EB ( ): Port size 3/4, 1 Dimensions: Port

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

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PF2D

0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Multistage Ejector Series ZL112/212 1

Note Comonent Parts Replacement Parts Description Material Sound absorbing material B No. No. PVF Suction cover q o ZL112-SP01 Sound absorbing material A Without valve PVF Front cover w !0 (Set no. for 9, 10 & 11) Suction filter PE End cover e !

For Water Digital Flow Switch Series PFW

View A PFW31(-M) PFW3-B DIN rail type 8-M3 3 x 7.2 (= 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 26

Multistage Ejector Series ZL

Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent plug P397110 Other than vacuum switch 8 Lead wire cover P397176 Vacuum switch specifications Front cover B With valve 12 Valve plate With valve 13 Needle With valve 14 Supply valve (N.C.) With valve SYJ514 15 Release valve (N.C.)

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Coolant Valve

) Nil B Note) Note) Only valve sizes 1, 2, 3 and 4.

0.5

US Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

Ejector Valve Unit Series ZYY/ZYX 1

ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !1 ZCU Section A-A' (Ejector) AMJ !

Ejector Valve Unit Series ZYY/ZYX

ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

C A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Catch the hook of the DIN rail bracket on the (b) side on the DIN rail. 2. Push side (a) onto the DIN rail and tighten the clamp screw.

CC

Thus, in spite of using pneumatic equipment, it performs similarly to a RE A B REC CX CY MQQ M A selection of valve unit is available to suit your application. High cylinder driving speed.

Magnetically Coupled

Stroke Note 1) 50, 63: L 0 0.008 8-V Effective thread length Y H A B G H B G NN (R) NA Q N F I NA F N CC0.1 NCY3B50, 63 NCY3B6 to 15 (inch) Model Symbol L K J I H G F D A B NN C MM CC N NA P NCY3B6 NCY3B10 NCY3B15 NCY3B20 NCY3B25 NCY3B32 NCY3B40 NCY3B50 NCY3B63 1.38 1.50 2.24 2.60 2.76 3.15 3.62 4.50 5.00 0.19 0.19 0.37 0.31 0.38 0.51 0.56 1.00 1.00 0.16 0.18 0.24 0.24 0.31 0.31 0.39 0.47

PSE530/200

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when workpiece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when workpiece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the workpiece for a few times. The optimum values will be set automatically.

CC

Thus, in spite of using pneumatic equipment, it performs similarly to a RE A B REC CX CY MQQ M A selection of valve unit is available to suit your application. High cylinder driving speed.

Low Differential Pressure Sensor

P-1 = A (A B) / 4 H-1 = (A B) / 2 A = Maximum pressure value B = Minimum pressure value For low differential pressure For low pressure For compound pressure PSE533 PSE543 PSE563 For positive pressure For vacuum Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers displayed.

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.