Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper (Standard),

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper (Standard),

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 45, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper (Standard),

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 45, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper (Standard),

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 45, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 75, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper (Standard),

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 100, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper (Standard)

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 100, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 125, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper (Standard)

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 150, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper (Standard)

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Table of Contents

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG Courtesy of Steven

Free Mount Cylinder

W ( ): Denotes the values of D-A93.

ISO Cylinder

A B Hs Hs Hs Hs Hs Hs Hs Hs Hs Hs D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9lV D-M9lWV D-M9lAV D-A9lV 17 B A A B D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-F7l D-F7lW D-J79 D-J79W D-F7BA D-F79F D-A7lH D-A80H 17 A B A B D-F7lV D-F7lWV D-F7BAV D-A7l D-A80 D-A79W D-H7C 17 A B A B D-C73C D-C80C D-J79C D-A73C D-A80C 17 Auto Switch Made to Order B A B A 102 C85/C75 Series Auto Switch Proper Mounting

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Table of Contents

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Smooth Cylinder/Low Speed Cylinder

A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.