Table of Contents (Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
12 1 1 12 12 12 0.5 10 20 30 31 50 100 101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50
High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for
43 P 25 40 65 90 P 30 50 70 90 Model CXWM10-25 CXWM10-50 CXWM10-75 CXWM10-100 Model CXWL10-25 CXWL10-50 CXWL10-75 CXWL10-100 53 53 CXWM20, CXWL20, CXWM32, CXWL32 F P 4-J Herical insert thread depth K CXWM25 CXWL25 F 28.5 31 33.5 33.5 46 58.5 71 83.5 F 31.5 31.5 56.5 56.5 69 81.5 94 106.5 P 25 45 65 90 90 90 90 90 P 65 90 65 90 90 90 90 90 I I Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm
1 L = 50 mm Max. speed = Over 200 mm/s !
Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P RZQ MI W S CEP1 W W > WV P > PV Determination of allowable load weight & pressure CE1 CE2 Inclined operation W WV P PV (For vertical operation, refer to page 10-2-54.)
F2 D 1.6 x ---P F3 D 1.6 x ---P F1 D 1.6 x ---P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (For vertical operation, refer to page 10-2-18.)
For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.
60 75 100 Nil None (Standard) P With fitting for purge air discharge 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 S With dew point indicator R Flow direction (Right Left) 5 Standard equipment 10 20 30 50 60 75 100 Note) In the case of two or more options, indicate them alphabetically.
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
H 20 C OUT for maintenance OUT Port size AF30: 50 AF40: 75 Min. clearance Drain for maintenance P AF10, AF20 AF30, AF40, AF40-06, AF50, AF60 Applicable model With auto drain (N.C.)
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
Hz*3 kW 2.0/2.5 Temperature stability*4 C CH1: 0.1, CH2: 0.5 Circulating fluid system Rated flow 50/60 Hz*5,*11 L/min CH1: 25/35 (0.5 MPa), CH2: 2/2 (0.5 MPa) Max. flow rate 50/60 Hz*11 L/min 55/65 Max. pump head m 50 Settable pressure range (-P) MPa 0.1 to 0.5 Min. operating flow rate 50/60 Hz*6 L/min CH1: 25/35 (-P: 15), CH2: 1/1 Tank capacity (CH1, 2 total) L Approx. 18 Circulating fluid
Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Note) At rated voltage Flow Characteristics/Weight Flow characteristics Note) 1 2 (P A) 2 3
Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold
50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20
(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P
ZPRI6Il is_ f8 .16 25 33. 50 5 I 6 '7 , ZPRlOO 1 0 1 2 15 24 32.9 49 5 6 6 51 , 50 51 51 50 48 ZPR25 I 48 51 50 48 Appl/cable tube (mm) .P Applicable tube 0 .0 Q ' R .s ,.4 4 20.6 15.6 16.6 ZPR32 ZPR40 56 54 56 54 57 55 56 54 lOA 12.8 ,.6 6 .21.6 ZI!
P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series
P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series