High Vacuum Angle Valve Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A
to 600 to 800 to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 With rod boot (mm) f l 901 to 1000 h Bore size (mm) e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 801 to 900 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 73 37.5 50 75
F G H J K L M N P Model Port size 30.5 [775] 23.6 [600] IDFB22E 1 11.4 [290] 24.5 [623] 5.3 [134] 15.9 [405] 27.5 [698] 3.7 [93] 1.8 [46] 1.0 [25] 0.5 [13] 12.4 [314] 3.3 [85] 13.4 [340] 33.7 [855] 26.8 [680] IDFB37E 11/2 IDFB55E, IDFB75E R Q Compressed air inlet Port size B A E D Compressed air inlet Port size H G Ventilation air outlet Illuminated switch Evaporation thermometer Ball valve
] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.
IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.
Yes None (Non-polar) Nil E Note) Note) A combination of Function [N] (Negative common) and [E] is unavailable. Since [E] has no polarity, it can also be used as a negative common.
Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !
Push-turn locking lever type [Type E] While pressing, turn in the direction of the arrow. If it is not turned, it can be operated the same way as the non-locking type. Cover Locked position Lever Groove LOCK Pin DC polar indication PUSH Caution Plug connector with cover When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.
<> <> ON(SVON ON) Unable to find motor phase in set time. (1-193) E <> ON SVON ON <> Output current limit exceeded E <> set value (1-194) <> Current sensor abnormality has occurred. (1-195) E <> <> Position error overflowed (1-196) E <> <> EEPROM Memory abnormality has occurred (1-197) E <> EEPROM 10 <> CPU CPU CPU error (1-198) E <> -93No.JXC-OMT0001CN-C 14. / A () 50mm
2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !
(0-149) D RESET SVON <> <> (0-901) E <> (0-902) E <> <> <> (0-910) E <> SDRAM SDRAM (0-911) E <> 87 No.SFOD-OMT0009CN-B code <> FROM FROM (0-912) E <> <> Modbus (CI 1 2 CI 3 4)OFF <> Modbus (0-913) E <> (0-914) E <> 88 No.SFOD-OMT0009CN-B (2) code <> , [] (1) (2) =0 (3) (4) (5) (6) (7) (1-048) B RESET <> <> [] (1) -+ (2) (1-049) B <> RESET <> + JOG <> + (1-052
Start time of circulating fluid temperature monitor 600 0 to 9 TEMPOUTSTART SEC No.24 circulating fluid temperature monitor is outside of the time range 5 0 to 600 TEMPOUTOVER SEC screen No.25 screen Dust filter replacement time*2 5000 1 to 9 FLTRTIME H No.26 screen DI filter replacement time*1 5000 1 to 9 DITIME H No.27 screen Temperature control speed 0 -10 to 10 CTRLSPEED piping). 2 Can
6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.
Description Material Note 1 Body Aluminum alloy Anodized 2 Branch passage PPS 3 Gasket HNBR 4 Sensor base PPS 5 Gasket HNBR 6 Sensor Au, Pt, Al2O3 Dimensions A B 70 H F E D 1.5 OUT IN 4 x P L K 2 x Port size N Symbol Model Port size A B D E F H K L N P PF3A703H Rc1, NPT1, G1 130 45 79.1 55.3 22.5 25 35 60 30 M4 x 0.7 depth 7 PF3A706H Rc1 1/2, NPT1 1/2, G1 1/2 170 60 94.1 70.3 30 68 45
W L E Panel mount adapter With waterproof cover ZS-35-B ZS-46-5F * For the lead wire with M12 connector, refer to p. 38.
Allowable kinetic energy at piston impact 20 32 25 Bore size (mm) Theoretical Output 50 to 700 50 to 600 50 to 600 Piston speed (mm/s) 0.17 0.271 0.32 Allowable kinetic energy (J) (N) Model Operating direction Operating pressure (MPa) Rod size (mm) Piston area (mm) Cushion Needle Adjustment Caution 0.2 0.1 62.8 47.1 98.2 75.6 161 121 0.3 188 141 295 227 482 362 0.4 251 188 393 302 643 482
Stroke H G T S (Shock absorber stroke) E SD TT EY EA EC Stroke adjusting unit h Shock absorber FA W Applicable cylinder MY2H25 MY2H40 SD 17.7 EA 8.5 13 EC 9 13.5 EY 36 56.5 FA 56.4 67.8 h 6 6 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) W 25.8 38 E 17.5 25 Shock absorber model RB1412 RB2015 8-13-19 20 Series MY2 Side Support Side support MYC-SA G 2-H C B A F E D Courtesy of Steven
Fluid Electrode Electromotive force (E) The electromotive force (E) is proportional to the fluid velocity (V) multiplied by the magnetic flux density (B). The volume flow is calculated by converting the measured electromotive force (E). An oval fluid passage is used to improve the magnetic flux density generated by small amounts of current.