MQQ

A B C D E F Part no.

MQQ

2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Counterbore depth RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 28 H thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40

Cylinder with Lock Series CNG

0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0. 1 C0. 1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 10 (12) 6 201 to 350 20 to 200 4 to 200 38 18 15.5 13 93 1/8 44.5 14

JXCx-OMT0061CN

90~100 DC24VSVON a) b) c) d) e) 82 - [] D (100 ) [] 1 19.4 1. 2. 3. 4. 5. 6. 7. 8. 9. 1000m [] /-10603585% 83 - 19.5 5 [] 19.6 SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 84 - 20. 20.1 / 20.2 ON 85 - 5 () 86 - 20.3 50mm 20.4 ( ) 87 - 20.5 / 20.6 D 100 20.7 88 - 21. , () YES NO LECPMJ LED 1 L RUNL ERR 2 ALM 3 (LEC-W2) 4 5 89 - No.

EXxx-OMZ0016

Brazil EXW1-BMJAAE E EXW1-BMJAAN N EXW1-BMJABE E EXW1-BMJABN N A Base MJ B A B EXW1-RDXNE4AE E EXW1-RDXNE4AN N EXW1-RDXNE4BE E EXW1-RDXNE4BN N EXW1-RDYNE4AE E EXW1-RDYNE4AN N EXW1-RDYNE4BE E EXW1-RDYNE4BN N EXW1-RDMPE3AE E EXW1-RDMPE3AN N EXW1-RDMPE3BE E EXW1-RDMPE3BN N EXW1-RDMNE3AE E EXW1-RDMNE3AN N EXW1-RDMNE3BE E EXW1-RDMNE3BN N A DX N B E4 A EXW1 DY N B Remote R A P B DM E3 A N B -17No.EX-OMZ0016

ZP

D Model A B2 C D E Vacuum inlet direction q Pad dia.

2/3 Port Valve

port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36

53

[L] Cooled substance specific heat C : 1.0 x 103 [cal/(kgfC)] Cooled substance temperature when cooling begins T0 : 30 [C] Cooled substance temperature after t hour Tt : 20 [C] Cooling temperature difference iT : 10 [C] (= T0 Tt) Cooling time it : 15 [min] Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W] * Refer to the following for the

Thermo-chiller

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

air-filter-e

AL-7S AL-6S AL-8S AL-9S 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 AL-7S A T N V AL-6S AL-8S AL-9S 2 Fiber Elements Specifications Operating temperature (C) 20 to 100 Differential pressure resistance (Max.) Element replacement differential pressure Four types of materials with different characteristics are available so the filters are applicable to any application.

Air Preparation Equipment

AL-7S AL-6S AL-8S AL-9S 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 AL-7S A T N V AL-6S AL-8S AL-9S 2 Fiber Elements Specifications Operating temperature (C) 20 to 100 Differential pressure resistance (Max.) Element replacement differential pressure Four types of materials with different characteristics are available so the filters are applicable to any application.

AZ1000

Changes from the standard type are: S SH 316L SS Electropolish + Passivation Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat Hastelloy C-22 316L SS AZ1202 AZ1206 AZ1210 AZ1215 AZ1225 Option Other Parameters Hastelloy C-22 316L SS HF Cv 1.1 Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop PCTFE (Option: Vespel)

C95

9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

A D J K LT LY MM N P AL E KA LX RT B EA LD F LH FA LS G (mm) 20125 140 160 180 200 250 300 145 16 M14 x 1.5 188 100 157.5 1/2 50 36 15 8 35 47 90 31 36 59 19 43 85 14 115 M30 x 1.5 Up to 1400 1401 to 1600 Lube Non-lube Air-hydro 161 16 M14 x 1.5 188 112 180.5 50 36 15 9 35 47 90 59 31 19 36 43 14 100 128 M30 x 1.5 Up to 1400 1401 to 1600 1/2 Data 182 18.5 M16 x 1.5 206 118 197 3/4 56 40 17

Shock Absorbers and Rate Controls

l o E g ::.: # 2A 1 0 0 : 0 0.2 0.4 0.6 0.8 I 1.2 1.4 1.6 TOTAL ENEFIGY (in bs/c) (Ihousaids) TOTAL ENEFGY (inrbs,t) .,,' 9 . . ' . r n I c { d E o 8 E , d o . i E i d TOTAL ENEFIGY (iN]bS/C) (Thousands) TOTAL ENERGY (rnlbsc) |o c{ N 0 E o. 5 5 m TOTAL ENERGY (in'lbebJ rTho!sands) l{ote Minimum impact velocity fol PRO modls is 10 in./sec.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Stroke H G T S (Shock absorber stroke) E SD TT EY EA EC Stroke adjusting unit h Shock absorber FA W Applicable cylinder MY2H25 MY2H40 SD 17.7 EA 8.5 13 EC 9 13.5 EY 36 56.5 FA 56.4 67.8 h 6 6 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) W 25.8 38 E 17.5 25 Shock absorber model RB1412 RB2015 8-13-19 20 Series MY2 Side Support Side support MYC-SA G 2-H C B A F E D Courtesy of Steven

ITV

Temperature characteristics 0 to 50C (With no condensation) Operating temperature range IP65 equivalent Enclosure Connection type Built-in One-touch fittings z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit

Stopper Cylinder

0 w q e r t u !