CS1

32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90 115 18.5 20 46 226 182 17 60 50 48 44 63 25 74 39 40 100 M45 X 1.5 M24 X 1.5 63 to 1200 140 23 25 56 110 277 225 67 60 60 20 55 71 30 86 49 50 126 M56 X 2 1 M30 X 1.5 80 to 1200 65 140 23 30 130 330 270 80 76 37 70 96 60 20 49 68 63 160

RHC

11.3 277 201.5 M33 x 2.0 25.4 22 52.5 7.5 4.5 23 47.3 32 41 47 30 54.5 M14 x 1.5 40 50 to 100 EA EA GA NE NF 4-FD Rc P GA Rc P WH H1 MM I FW ND E D FY E Effective thread C B FX JC JC FB FT K A H S + Stroke ZZ + Stroke FA FZ FX FW 96 FT 78 FD 15 FB 11 FA 10 EA 23 D 62 C 20 B 53 A E Bore size (mm) 50 Stroke range (mm) Up to 1200 Eff. thread length 32 50 0.042 70 35 0 63 Up to 1200 32 55 0.074

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

VP300/500/700

(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire

Digital Flow Switches, Series PF2A, Series PF2W

(3) DC() 4-4.5 2-Port size 6 50 40 Use this sensor by connecting to P/A remote type display unit Series PF2W3.

VEX1

/60Hz) 2 200V AC (50/60Hz) 3 110V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 12V DC 7 240V AC (50/60Hz) 9 Other Option Body size Port size Electrical entry (Only solenoid) Port size Rc(PT) P, A port R port Body size Electrical entry Port 01 1 02 VEX 1 8 1 8 G Grommet (300mm lead wire) 1 4 1 4 H Gromet (600mm lead wire) 02 3 03 1 4 1 4 D DIN connector 3 8 3 8 DO DIN connector (Without connector

Compact Guide Cylinder

Plug Part Number Bore size [mm] Part number Port thread type Quantity 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 * 1 set includes 8 pieces.

High Power Cylinder Series RHC

32 3/8 M33 x 2.0 25.4 22 52.5 4.5 7.5 47.3 23 41 6.8 to 11.3 32 30 277 47 54.5 M14 x 1.5 201.5 40 50 to 100 EA EA GA NE NF 4-FD GA Rc P Rc P H1 MM WH I FW ND E D E FY Effective thread JC JC FB FT C K B FX A H S + Stroke ZZ + Stroke FA FZ (mm) FX FW 96 FT 78 FD 15 FB 11 FA 10 EA 23 D 62 C 20 B 53 A E 0 Bore size (mm) Stroke range (mm) 250 to 1000 Effective thread length 32 50 70 35 50 0.042

0.4

3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4(A) 2(B) 1(P)

Possible to transfer a workpiece at low-speed.

67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 10 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M 8 x 1.25 12 M5 x 0.8 M 8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10

3 Port Solenoid Valve Series SYJ300/500/700

N.O. + P. 33 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2R3 (ARR) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P.1 SYJ500 Push-turn locking lever type DIN terminal 1.2 2R3 (ARR) 1/8 (SYJ500, 700 only) P.15 SYJ700 M8 connector 2.7 2R3 (ARR) 1/8, 1/4 P. 33 Note) All AC voltage models have built-in surge

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

90 102 115 140 165 190 25 37.5 50 75 100 125 77 19 46 Refer to p.1.4-19 and 1.4-20 for further information of rod end nut and accessories.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

air-filter-e

Pressure Control Equipment Industrial Filters P.245 AMG Water Separator P.246 AFF Main Line Filter P.247 AM Mist Separator P.248 AMD Micro Mist Separator P.249 AMH Micro Mist Separator with Pre-filter P.250 AME Super Mist Separator P.251 AMF Odor Removal Filter Industrial Filters 1 Indication of replacement of elements, inspection items P.253 2 How to arrange replacement element kit number

Air Preparation Equipment

Pressure Control Equipment Industrial Filters P.245 AMG Water Separator P.246 AFF Main Line Filter P.247 AM Mist Separator P.248 AMD Micro Mist Separator P.249 AMH Micro Mist Separator with Pre-filter P.250 AME Super Mist Separator P.251 AMF Odor Removal Filter Industrial Filters 1 Indication of replacement of elements, inspection items P.253 2 How to arrange replacement element kit number

Digital Flow Switches

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

CNG

40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg

MXS Series Air Slide Table

38 50 Note) Refer to "Dimensions" of MXS8 on P.56 for one with shock absorber as symmetric.

Shock Absorbers and Rate Controls

0/.000 P[r2050(n(s] 12.06 751 +.010/.000 .t 51 +.010/.000 t.250 + . 0 0 0 / . 0 1 0 l_50 .630 +.020/.0002.88 1.50 t.50 t_40 t.06 N/A .90 8.2 P 2 | 00(ttt5l 16.06 .t 5l +.010,/.000 t.250 +.000/.010 1.50 .630 +.020/.0002.88 1.50 1.50 1.40 t.06 .90 t.3 PM2t 50qil(S) 21.13 t51 +.010/..000 .7 5l + 010/000 i.250 +.0001-.010 t.50 .630 +.020/..000 2.88 t.50 t_50 t.40 1.06 r.r/A .90 11.1 8.3?