CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.) Maximum acceleration: 2000mm/s2 Positioning distance (mm) 1 1000 500 100 10 10 0.5 100.5 50.5 10.5 1.5 100 0.5 10.5 5.5 1.5 0.6 Speed (mm/s) 500 0.5 2.7 1.7 0.9 0.6 1000 0.5 1.9 1.4 0.9 0.6 A B C D Values will vary slightly depending on the operating conditions.

CQS

75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

2/3 Port Valve

Ambient and Fluid Temperature Fluid temperature C Ambient temperature C (3) High temp. water (D, E, N, P) (3) High temp. oil (D, N) Temperature Power Water (Standard) Air (Standard) Oil (Standard) 99 (4) 100 (4) 80 60 10 60 40 40 60 60 40 1 AC DC AC/DC Max. Material No.

C95

0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W D-Y69, D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM

CE

bore size (mm) D C d H B C D Part no.

CE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 30 d Applicable bore size (mm) D C d D C B H Part no.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

0.4

W Note) VQC 4/5 Note) VQ2000 only VQZ D side U side Manual override Nil B C D 1 2 3 Stations 4-position dual port (N.C. +N.C.) 4-position dual port (N.O. +N.O.) 4-position dual port (N.C. +N.O.)

•

D-A30 type D-G3/K3 type OJ D> U> 0' Hs ; c[j A AulO switch o o c: C' iii' JJ o Q, .J!

Stability of suction position,

D D D 32 32 61 50 53.5 22.61) 5 56 25.11) 7 4 4 30 (Rotating angle) 30 (Rotating angle) 83 80 103 100 D-D D-D 22 22 26 26 11 11 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF80UMJB10 105 165 444 442 459 ZP3E-YF80UMJB30 130 190 475 473 490 ZP3E-YF80UMJB50 150 210 500 498 515 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF100UMJB10 107.5 167.5 482 478 508 ZP3E-YF100UMJB30

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

ZPT/ZPX

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

JXCx-OMT0001CN

0.4 0.6[Nm]) 0.4 0.6[Nm] -31No.JXC-OMT0001CN-C A B M5X14 (2) () M3 -32No.JXC-OMT0001CN-C (1)D (100) (2)2mm 2 D (3) 40 50mm ()100mm 100 -33No.JXC-OMT0001CN-C 5.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CM2

Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

VQZ1000/2000/3000

Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) Black (DC) Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Indicator light For with Light/Surge Voltage Suppressor Circuit for DC Circuit for AC Indicator light A () A [+] SOL SOL C (+) C ZNR Indicator light [] Due to the use of non-polar light, the series