Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

AC

AFM3000 to AFM4000-06 Combination Table/Accessory and Option Combinable Impossible Depends on the model Applicable mist separator Option Auto drain Sym Accessory/Option AFM2000 D D C 2 6 8 C J R W AFM3000 AFM4000 D D C 2 6 8 C J R W Pressure differential auto-drain Float style auto drain (N.O.)

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

RHC

Basic weight 500 st 2.44 (kg) (Foot style 32) Additional weight 0.09 (kg/50 st) Cylinder stroke 600 (st) 2.44 + 0.09 x (600 500)/50 = 2.62 kg Accessory Mounting nut Rod end nut 30 30 d d D D C C H H B B Material: Carbon steel Material: Carbon steel B Part no.

VQ5000

Kit designation CU1 Note 1) C Stations Kit (connector) CU2 Note 1) 02 2 stations Direct exhaust with silencer box: D and U side exhausts Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust P65 enclosure SB SD Note 1) 12 12 stations SU Note 1) W U D U D Note) Combination of [C ] and [S ] is not possible.

ZX

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

Magnet: Built-in Magnet, Mounting: Axial Foot, Tube Material: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 600mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -, Made to Order: -

Magnet: D (Built-in Magnet), Mounting: L (Axial Foot), Tube Material: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 600mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m)

3

Min. load impedance: 50 Max. applied voltage: 28 V, Max. load current: 80 mA, Internal voltage drop: 1 V or less C: Analog output: 1 to 5 V Output impedance: 1 k D: Analog output: 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 PNP (1 output) + External input type PFMC7--HNPN (1 output) + External input type PFMC7--GBrown DC (+) Brown DC (+) Load U Black OUT1 Black OUT1 Main

Booster Regulator/Air Tank

Booster regulator IN port C ARX EXH: C EXH: C Spare port Rc1/2 (A) AMR D D (A) (B) (B) OUT OUT 305 Tank OUT port Rc1/2 ARM 216 216 180 4 x 13 4 x 13 50 50 ARP Drain valve 100 100 Drain port Rc1/4 IR-A 200 200 400 700 678 IR Booster regulator model A B C D VBA20A 481 394 Rc3/8 VBA40A 520 429.8 Rc1/2 VBA22A 444 394 Rc3/8 469 VBA42A 477 429.8 Rc1/2 493 IRV The length may be longer than the

ITV

Temperature characteristics 0 to 50C (With no condensation) Operating temperature range IP65 equivalent Enclosure Connection type Built-in One-touch fittings z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit

CE

mm) Applicable bore size (mm) D C d D C Part No.

Pneumatic Transfer System Series MF

H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424 508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15

VQ5000

Combination of [C ] and [S ] is not possible. Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 11 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Flow Characteristics Series Flow characteristics C [(dm3/sbar)] b Cv 0.12 0.21 0.74 0.36 0.32 0.35 0.46 0.83 2.9 SYJ3000 SYJ5000 SYJ7000 Cover (stainless steel) Rubber seal 4/5 Port Solenoid Valve Series SYJ3000/5000/7000 Variations Option Manual override Sonic conductance: C [dm3/(s.bar)] Type of actuation Series Voltage Electrical entry With light/surge voltage suppressor SYJ3000 For DC

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Vacuum Filter AFJ Series

Note 2) The seal is for 40 m and 80 m elements. 784 Vacuum Filter AFJ20 to AFJ40 Series Dimensions AFJ20 N T J M D U Bracket (Option) S SP R ZCUK C B V Q IN OUT AMJ AFJ AFJ 2 x P (Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Flow Characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-21P SYJ323 1/8 M3 x 0.5 0.9 SS5YJ3-32P-M5 SS5YJ3-32P-C4 Base mounted for internal pilot 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 M5 x 0.8

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.