High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Table of Contents

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

ISO Cylinder

W Double knuckle joint V (1 pc.) V (1 pc.) Standard Mounting Bracket/Accessory Part Nos.

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

Table of Contents

4 @1 w @4 !0 y !3 !5 @3 !0 !

Table of Contents

W.

Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 32mm, Port Thread Type: TN (NPT 32-100 Bore), Stroke: 100mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: V (Single Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Air Cylinder

CBM2-20-PS-W CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W 11 Lock spring Stainless steel 12 Bumper Urethane * Seal kit includes @6 and @7. Order the seal kit, based on each bore size. (Except #3.) * Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

Air Cylinder

Contents 20 CBG1N20-PS Set of the nos. @5, @6, @7, @8 and grease pack 20 CBG1N20-PS-W Set of the nos. @5, @6, @7, @8 and grease pack CBG1lN Rubber bumper type CBG1lN Rubber bumper type 25 CBG1N25-PS 32 CBG1N32-PS 40 CBG1N40-PS 25 CBG1N25-PS-W 32 CBG1N32-PS-W 40 CBG1N40-PS-W Order seal kit in accordance with the bore size. * The seal kit includes a grease pack (10 g).

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

MY1

25 300 A93 Number of auto switches Guide type 2 pcs. 1 pc.

NCQ8

M2 bolt circle M1 W I dia.

Table of Contents

9@0 w!0!1 e !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

CQS

D-A9l D-A9lV D-F9N/D-F9B D-F9P/D-F9lW D-F9lV/D-F9lWV Symbol A B W A B W A B W A B HS Double acting: single rod, Single acting: single rod/spring return, spring extend 4.5 (3.5) 5.5 (6.5) 1.5 (2.5) 1.5[4] (2.5[5]) 2[4.5] 1.5[1] 3.5[-1] 1.5 (2.5) 12 19 5.5 4.5 5.5 17 0 0 Bore size (mm) 16 20 25 21 24.5 26.5 4 7.5 9.5 6 10 11 6 2.5 0.5 4 7.5 9.5 6 10 11 19 22.5 24.5 0 3.5 5.5 2 6 7 0 3.5 5.5

CQS

(N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

2–4

D-A93.