CM2

115 140 165 32 18.2 36 32 72 185 25 37.5 50 75 100 125 85 97 110 135 160 12.5 52 65 77 90 115 140 165 40 20.2 46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301

70astamb1

Besides, the overall length is longer than the cylinder with air cushion as follows, because the bumpers are attached to the both sides of the piston: 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm. 32 40 50 63 80 100 90 90 102 102 124 124 164 200 200 141 145 164 Stroke range Bore size (mm) Effective thread length Width across A D Ee11 F G H MB J K MM N P S V W ZZ C B flats 19.5 27 32 32

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note) Since the electrical entry is LO, select a connector assembly part no. from those stated on page 90.

Environment

(LEJS63) 120 Model Selection LEJ Series AC Servo Motor Clean Room Specication SpeedWork Load Graph/Required Conditions for Regeneration Option(Guide) LEJS40/Ball Screw Drive LEJS63/Ball Screw Drive Horizontal Horizontal 0 10 20 30 40 50 60 70 80 90 60 Lead 8: LEJS40B Lead 10: LEJS63B LEF A 50 Area where the regeneration option is required.

CRBB-OM00004

90 Nil 2 Z* Grommet / Lead wire: 5 m 180 180 S 1 * The 5m lead wire is produced upon receipt of order. * Connectors are only available for the R73, R80, and 270 270 T79.

Rotary Table

0.2 to 0.2 to 0.2 to Rotation Time Adjustmen t Range 1.5s/90 2.0s/90 2.5s/90 With internal shock absorber 0.2 to 0.7s/90 0.2 to 1.0s/90 With external shock absorber 0.2 to 1.0s/90 Note4) Cylinder bore size 15 18 21 25 28 32 40 Port size M5x0.8 Rc1/8 (G1/8, NPT1/8, NPTF1/8), M5x0.8 Note1) Minimum operating pressure of MSQA10 (High precision type: size 10) is 0.2MPa.

mb1

Besides, the overall length is longer than the cylinder with air cushion as follows, because the bumpers are attached to the both sides of the piston: 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm. 32 40 50 63 80 100 90 90 102 102 124 124 164 200 200 141 145 164 Stroke range Bore size (mm) Effective thread length Width across A D Ee11 F G H MB J K MM N P S V W ZZ C B flats 19.5 27 32 32

180

-X 2 10 1 MRHQ 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 MA Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D D20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 703 180 Angular Type Air Gripper Cam Type MHY2 Series 10, 16, 20, 25 How to Order MHY 2 16

AMF

90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AMF150 AMF250 1/2 3/8, 1/2 AMF350 3/4 AMF150SAME, #1 AMF250SAME, #2 AMF350SAME, #3 4.6-31 Odor Removal Filter Series AMF Dimensions: AMF450 to AMF850 HAl AT IDl AMG AFF AMl M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 Related poroducts 36 9 205 19 100 106

Hydraulic Cylinders

Mounting bolt D C C Model D D 55 Mounting bolt C Model Mounting bolt 70 M5 x 55l CHKDB50 CHKDB20 M10 x 70l 5 (M) 5 (M) 75 x 60l x 75l 10 (M) 60 10 (M) x 65l 80 x 80l 15 (M) 65 15 (M) x 70l 85 x 85l 20 (M) 70 20 (M) x 75l 90 x 90l 25 (M) 75 25 (M) 12.4 x 80l 95 x 95l 30 (M) 80 30 (M) 15.8 x 85l 100 x 100l 35 (M) 85 35 (M) x 90l 105 x 105l 40 (M) 90 40 (M) x 95l 110 x 110l 45 (M) 95 45 (M)

Short Stroke Electric Actuator Series LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60%

Title not found

60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9

Title not found

60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9

KR

P. 13 Straight union Plug-in elbow Different diameter tee Use to change by 90 in a tube fetching direction from Onetouch fittings. P. 11 KGH KGL KGT P. 15 Use to connect tubes with size down in both 90 directions. Use to connect tubes in the same direction.

Table of Contents

100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

2/3 Port Valve

90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

Stroke Reading Cylinder and Counter

to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC Power consumption 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

NAAMS Standards Compliant

size: 63, Arm opening angle: 90, Distance to the center of gravity L: 250 mm Calculation example With an arm opening angle of 90 and a 250 mm distance to the center of gravity, according to the graph, the maximum allowable load mass is 4.0 kg. 10 CKZ3N -X2742A -X2568 Setup Procedure Precautions 1) The tightening torque of the clamp arm is 12 to 15 Nm for 50 and 15 to 20 Nm for 63.

RHC

145 120 20 13 25 63 30 90 116 40 80 0.074 37 Up to 1500 0 Data ZZ 6.8 to 11.3 WH P 310 S 1/2 MM 215 NF M18 x 1.5 H1 58 NE 27 H 11 ND 25 GA 80 K 31 FZ 16 JC 7 I 75 Bore size (mm) 50 116 63 310 1/2 215 M18 x 1.5 27 11 24.5 80 31 16 7 124 75 72 80 8.5 to 13.5 336 3/4 228 M22 x 1.5 32 13 30.5 90 37 20 10 155 78 89 100 351 3/4 236 M26 x 1.5 41 16 34 95 47.3 20 10 172 80 110 10-6-15 15 Series