Compact Cylinder with Air Cushion

eccentricity mm 80 YA-08 100 340 36 12 100 YA-10 Bore size 32 40 50 63 80 100 B type mounting bracket 1 1.5 2 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9 4.5 M12 x 1.75 10.5 18 10.5 18 M14 x 1.5 19 8.5 19.5 6 Rc 1/8 46 152 14.5 15 75 66 26.5 5H9 5.5 M8 x 1.25 12 55 33 5H9 5.5 11-9-27 28 Series MSQ Proper Auto Switch Mounting Position at Rotation End Size: 1 to 7 B B A A When D-F8 is used When D-F9 and M9 are used Solid state switch D-F8 Rotation D-F9W

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable color Connector C terminal no. Brown 2 Red 1 Orange 6 Yellow 5 Green 3 Blue 4 Weight Product no. Weight [g] Note LE-CP-1-B-S 240 Standard cable LE-CP-3-B-S 380 LE-CP-5-B-S 630 LE-CP-1-B 190 Cable color Connector D terminal no.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

B J A D EA K MM TDe8 AL F KA FA M G N R TT P TX (mm) 125 140 160 180 200 250 300 1/2 90 0.050 0.089 145 115 M14 x 1.5 M30 x 1.5 170 50 47 36 59 43 15 31 14 19 16 35 98 1 50 32 25 to 1000 Lube Non-lube Air-hydro 1/2 90 0.050 0.089 161 128 M14 x 1.5 M30 x 1.5 190 50 36 59 15 47 43 14 31 19 16 35 1.5 98 55 36 30 to 1000 3/4 90 0.050 0.089 182 144 M16 x 1.5 M36 x 1.5 212 18.5 56 40 59 17 53 43

2–4

B A Through-hole (standard) Both end tapped (32 to 50) 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm Note 1) Cylinder bodies of 12 to 25 are common for both B (through hole) and A (both end tapped) types. Symbol to order is unified to B for those sizes. Note 2) Contact SMC for the other mounting types.

C95

9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

SMC Pneumatic Clean Series

10-/21-CG1W63 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 20 25 32 40 50 63 80 100 100 Non-lube Double acting, Available double rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction flow rate of vacuum suction type (Reference values) Specifications

Stroke Reading Cylinder and Counter

8 Rc 41 40 5.5 M6 x 1 62 30 14 64.5 1 4 Rc 49 50 6.6 M8 x 1.25 61.5 35 19 76.5 1 4 Rc 49 60 9 M10 x 1.5 64 35 19 89.5 For rod end nut accessory bracket, refer to page 658.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

x 1 Rc(PT)1/8 20 to 50 8 tube Ball joint rotation 15 Buffer Specifications 20 to 50 10 to 16 Pad diameter (mm) M14 x 1 M10 x 1 Mounting 10, 20, 30, 50 10, 20, 30, 40, 50 Stroke (mm) 0 stroke 0 stroke 1.0N {0.10kgf} 2.0N {0.20kgf} Spring reactive force Stroke end Stroke end 3.0N {0.31kgf} 5.0N {0.51kgf} Without detent (J), With detent (K) Detent specifications Weight Table (g) Vacuum entry

Compressed Air Preparation Filter

Improved visibility due to 2-color indication Functional element (Green) Element requiring replacement (Red) 2 Modular Connection Type Compressed Air Preparation Filter AFF/AM/AMD/AMK Series Lightweight Series Size Weight [kg] Reduction rate [%] Weight AFF/AM/AMD1 20 0.19 b 0.38 50 Max. 50% lighter 1 30 0.39 b 0.55 29 0.19 kg b 0.38 kg 40 0.79 b 0.9 12 50 1.23 b 1.4 12 60 1.46 b 2.1 30 AMK2

Clamp Cylinder with Lock Series CLK1

Symbol Auto switch positioning and mounting 40 50 63 2 pcs. 1 pc. "n" pcs. Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A 50 bore size is selected. 50 100 40 32 25 20 50 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) 8-25-6 6 Model Selection Series MGZ/MGZR 2.

7

Hs B A 16 8.5 D-B54 Hs B 33 A Minimum Stroke for Auto Switch Mounting Unit: mm Same surface With 2 pcs. Auto switch model With 1 pc. Different surfaces D-P3DWA D-P4DW D-P79WSE D-P74 24.5 50 50 50 12 D-M9 D-M9W D-M9A Caution D-A9 D-B54 50 50 75 As for the precautions on the auto switches, product specifications, refer to pages 437 to 439.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P R1 R2 Indicator light 2-6.5 mounting hole 42.5 42.5

MVGQ

50 to 350 (Refer to page 10-16-1.)

LEC-OM02904

: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

Title not found

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied