PSE540/560

42.7 g 49.3 g 41.4 g 41.6 g 43.3 g 44.1 g Weight Without sensor cable 2.9 g 3.2 g 9.8 g 1.9 g 2.1 g 3.8 g 4.6 g 16-3-25 4 Series PSE540 Internal Circuit PSE54 Voltage output type 1 to 5 V Output impedance Approx. 1 k Brown DC (+) Main circuit 1 k Black OUT 10 to 24 VDC + (Analog output) Load Blue DC () Dimensions PSE5R04 R06 PSE54M3 M5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

NCA1

BB BC F G Bore 500 600 800 Stroke (In inches and hundredths) Standard Oversized rod High temperature Low temperature Oversized W/ high temperature Oversized W/ low temperature Stainless steel piston rod L S R X D Note: Tie rod length varies by mounting style.

Modular F.R.L. Unit

A OUT IN OUT IN A G H H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

Ejector Valve Unit Series ZYY/ZYX 1

ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP Precautions ZCU Be sure to read before handling.

V100

Grommet (G), (H): V11 24(A)-G H-M5 13.1 (Light/Surge voltage suppressor) 5 + 13 15.5 3 13 3 28.5 [32.4] 10 G: Approx. 300 H: Approx.600 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 30.9 [33.1] 25.1 11.4 5.7 5.7 5.7 2 1 7 5 9.5 5 19 (Piping

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q Q B Pressure gauge (accessory) K H OUT Pressure gauge port size Square embedded type pressure gauge (accessory) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D AC30A, 40A A N F E P K C G G OUT IN B Pressure gauge (accessory) K OUT Pressure gauge port size J L Square embedded type pressure

VNB

, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Main port VX3 G (Grommet terminal: E) H (Conduit terminal: T) In the case of EZ or TZ, the length is longer by 10 mm.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Booster Regulator Series VBA1110 to 4200 1

G H AV OUT port AU AF 4-12 mounting hole Silencer (Option) O EXH port: 1 position AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F EXH port: 1 position D E IR A 300 404 B 126.5 167 C 53 96 D 73 116 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15

Table of Contents

(g) Bore size (mm) Hexagon socket head cap screw dia.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 17-5-51 10 Series LVD Dimensions Basic type A D L K 4-M (Q) 2-P one-touch fitting Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Breathing port PB H C PA G

ZSE30/ISE30

76 g 81 g Weight Without lead wire with connector 40 g 38 g 43 g 16-2-5 6 Series ZSE30/ISE30 Setting Pressure setting Press the button.

CL

Basic Foot Front flange W/o rod boot W/ rod boot S W/o rod boot W/ rod boot W/o rod boot W/ rod boot S Stroke range LS Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 WB S Bore (mm) Bore (mm) Bore (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 GB GB TB GB ZZ 206 223 226 250 ZZ ZZ 210 ZZ ZZ 206 223 226 250 ZZ 20 25 32 40 20 25 32 40 20 25 32 40 186 201 204 230 190 201

70pvvna

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Main port VX3 G (Grommet terminal: E) In the case of EZ or TZ, the length is longer by 10 mm.

CXT

) 258-9200-www.stevenengineering.com Y Z 2-M5 x 0.8 2-RB G G HT U (NA) (Option) A L HN (Max.)

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

VXR21/22/23

Add 10 g for conduit type, 30 g for DIN terminal 60 g for conduit terminal type respectively. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential min. operating pressure differential and max. system pressure.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation G 1 N.C. (B contact) 2 pcs.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

PEND 11-6-1 2 Mini-rotary Actuator Series CRJ Rack & Pinion Style/Size: 05, 1 43 (54) 48 (61) Compact Compact Lightweight Lightweight CRJ05:32 g (39 g) CRJ 1:54 g (67 g) CRJ05: 32 g (39 g) CRJ1: 54 g (67 g) 19.5 23.5 13.5 16.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com