Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

0.5

1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R 25 IZF10R

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

Table of Contents

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

Modular Type Regulator Series AR

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

ZP

A A Width across flat D (Hexagon) Width across flat 8 (Hexagon) 3 3 B E E Width across flat 12 (Hexagon) B Width across flat 8 (Hexagon) 6 8 5 10.5 E 2.5 11.7 6.6 Dimensions Dimensions A B E 4 3 A B Model ZPT4-A6 ZPT4-A8 M6 x 1 M8 x 1 D 8 12 E 3 4.5 Model ZPT2-A5 ZPT2-A6 M5 x 0.8 M6 x 1 21 26 26 16 ZPT3-A6 Adapter part no. ZPT1-B4/B5 Adapter part no.

ML2B

RB No. of piping surface Head cover Piping surface Operating direction Left Right r Front G H t Head cover WR Side w Head cover WL Side C D e Bottom E F y q J Bottom K L Front A B I DJ Note 1) The 6 types of tcentralized piping shown above are available in centralized piping model.

ML2B

2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

MQQ

A B C D E F Part no.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

MGP

Note 6) Dimension E' cannot be less than the standard dimension E.

Power Valve: Economy Valve Series VEX5

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

Vacuum Unit

Pressure sensor assembly: 3 m (With lead wire) Note Centralized wiring specification (Plug-in) Individual wiring specification: 300 mm (Connector assembly)4 Symbol C V None V Cannot be selected when e is N C1 V None None Cannot be selected when e is P or T L None V V Cannot be selected when e is N L1 None None V L2 None V None Cannot be selected when e is P or T L3 None None None 4 For the

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No.

LEF-OM006xx

LEFB25 2 LE FB16 LEFB16 0 0 500 1000 1500 2000 V (mm/s) -13- 2.3.

AC Servo Motor Driver (SSCNET /H Type)

Da.8 Command speed 0 2005+ 6000n 6005+ 1000n Pr.9 Acceleration time 0 18388608(ms) 1000 12+150n 13+150n Pr.10 Deceleration time 0 18388608(ms) 1000 14+150n 15+150n (Note 1) Refer to the operation manual for used equipment for details.

CM2

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 MB f l 9 h ZZ + Stroke MB1 3 Width across flats B 3 Width across flats B CA2 With rod boot (Both sides) e e CS1 C76 9 9 l + Stroke 9 l 9 f f C85 Cushion valve Width across flats 1.5 h + Stroke h ZZ + 2 x Stroke C95 With air cushion CP95 NCM NCA Built-in One-touch fittings One-touch fitting port size P D-X

OMU0023

How to order L E C C G 1 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions 70 - (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 71 - 8.