Gun Type Ionizer

: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

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6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

LJ1H

Applicable strokes:150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LJ1S2021SC-150-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Mounting orientation Load movement direction Model Pitching Rolling Yawing 5.5 6.0 8.5 a = 500 LJ1S20 150 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a a = 1000 L1 (mm) L2 (mm) L3 (mm) 100 a = 2000 Pitching Rolling

Adsorption Plate

Adsorption surface size SP1330 SP1430 SP1530 SP1630 150 x 150 180 210 20 150 82.5 97.5 120 16 200 x 200 230 260 20 200 107.5 122.5 145 25 250 x 250 280 310 25 250 132.5 147.5 170 36 300 x 300 330 360 25 300 157.5 172.5 195 49 754 SP Series Adsorption Plate Square/SP230 SP SP A D ZCUK Rc 1/8 (Suction port) C AMJ AFJ AMV ZH -X185 B D F Related Products G E 4 x 5.5 drill Element fixing nut N

Basic Type/Direct Mount Type

Note 3) Bore size determination E Es NG Determination of allowable stroke (W + WB) V 2 E = x ( ) 2 1000 E Es Note 2) OK Determination of pressure (P) when making intermediate stop Review of order made products based on operating conditions P Ps DNote 1) This cylinder cannot perform an intermediate stop using an air pressure circuit in vertical operation.

RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Environment

0 i o e r t q u !1 !2 !3 !

3 Position Cylinder Series RZQ

P2 [MPa] 0.75P1 0.75P1-0.012m 0.75P1-0.0078m 0.75P1-0.0050m 0.75P1-0.0031m 1.5P1-0.024m 1.5P1-0.016m 1.5P1-0.010m 1.5P1-0.0063m Bore size (mm) 32 40 50 63 32 40 50 63 Orientation Circuit Horizontal A Graph 3 10 Line Circuit Orientation Movement Down A r e Extension 2 3 4 5 A Horizontal e r Retraction e Extension A Down Overrun (mm) e Retraction Up C w q Extension 1 B Up e Retraction q P1

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19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Compressed Air Preparation Filter

E E D C Center of body Center of body B C B (Excludes the Y300T-D) EE Part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRQ2 Angle adjusting screw Angle adjusting screw Angle adjusting screw MSQ MRQ 0 A R R 9 n Dot ot gl e A e n at at v n io a o gl io io ct dj o e re u n n gr a st di dj ra ra in y g u g 20in n n e st di st g k g in re u e e g of dj ct a di of of io e re e n gl ct n g k A k io n e e n ra y y gr n gr io o o at o o ot v v R e e 9 9 0 0 The rotation range under the adjustment of an angle at 60

HRX-OM-Q026

HRSH100/150/200-A: 2 pcs. are used per unit HRS-S0185 Dust-proof filter 1 pc.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. 11-7-42 Angle adjusting screw Angle adjusting screw 0 A R R 9 n ot ot gl e e n at at v io a o io io ct dj o re u n n gr st di ra ra in y g g in n n e di st g k g re u e e of dj ct a of of io e e n gl n g k A k n e e ra y y gr n gr io o o at o o ot v v R e e 9 9 0 44 Series CRA1

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

Air Cylinder NCA1 Series

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

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HRS HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRSE HRZ HRZD Lots of variations are available in response to the users requirements.

Support Guide/11-LEFG Series

depth 9.9 LEF 44 60 LEJ 5.5 5H9 (+0.030 0 ) depth 5 LEL 48 70 A (Table traveling distance) L 61 (62) 10 10 LEM 60 46.8 LEY (60) 32 30 LES Vacuum port Rc1/8 n x 5.5 LEPY LEPS 60 LER 150 D x 150 (= E) B 15 LEH LEY -X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180 4 11-LEFG32-S-100 250 107 230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350 207