CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

3

Therefore, it is important to secure as a danger zone a cylindrical area with the length of the clamp arm as its radius, and the stroke plus 20 mm as its height. 123 135 155 203 363 518 65 56 Head flange (including mounting bolt) 130 150 175 209 371 578 69 58 Calculation: (Example) MKG20-10RNZ Standard calculation: MKB20-10RZ Extra weight calculation: Head flange With arm ...222 g .130

CJ2Q

Low Friction: Double Acting Single Rod Series CJ2Q 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Basic Axial foot Front flange Double clevis Standard stroke (mm) B L F D 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CJ2Q L 16 60 Standard L 16 60 C73 CDJ2Q With auto switch Number of switches With auto switch (Built-in magnet) 2 1 n S n Auto switch

CG5-S

with One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P. 25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Without motor brake Without motor brake With motor brake With motor brake Without motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175

Hydraulic

CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other

Tamper Proof and Flat Head Screw

Flow direction symbols on body Flow Rate and Effective Area Meter-out type Meter-in type ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 4, 6 8, 10 1/8 5/32 3/16 1/4 6, 8 6 Metric sizes Symbol JIS symbol 1/4 5/16 3/8 Tubing O.D. 3/16 1/4 Inch sizes 1/4 5/16 3/8 3/8 19.8 flow Flow rate l/min (ANR) {Nl/min} 1200 1300 175 295 350 600 9.1 700 75 500 Controlled (Free) Effective

A

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

VFS

Rc , 1 4 3 8 2 position double: VFS3210-E, VFS3210-D 3 position closed center: VFS3310-E, VFS3310-D 3 position exhaust center: VFS3410-E, VFS3410-D 3 position pressure center: VFS3510-E, VFS3510-D 3 position double check: VFS3610-E, VFS3610-D 2-5.6 mounting hole 2-5.6 mounting hole Applicable heavy-duty cord O.D. 8 to 10Pilot valve manual override Light window at DZ, EZ 165 (3 position: 175

Table of Contents

Rc , 1 4 3 8 2 position double: VFS3210-E, VFS3210-D 3 position closed center: VFS3310-E, VFS3310-D 3 position exhaust center: VFS3410-E, VFS3410-D 3 position pressure center: VFS3510-E, VFS3510-D 3 position double check: VFS3610-E, VFS3610-D 2-5.6 mounting hole 2-5.6 mounting hole Applicable heavy-duty cord O.D. 8 to 10Pilot valve manual override Light window at DZ, EZ 165 (3 position: 175

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

End Lock Cylinder Series CBG1

Rear trunnion type (mm) With front lock/R Bore size (mm) Rear trunnion type/CBG1T (with front lock-R only) Z (rear trunnion) ZZ (rear trunnion) With rod boot With rod boot Without rod boot Without rod boot 124 + l 145 + l 20 125 104 131 + l 152 + l 25 130 109 133 + l 157 + l 32 135 111 147 (154) + l 175 (182) + l 40 155 (162) 127 (134) 168 (179) + l 200 (211) + l 50 180 (191) 148 (159) Z

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

Soft Start-up Valve AV2000/3000/4000/5000

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Compact Hydraulic Cylinder Series CH
KGB

CHKGB50 5 (M) 5 (M) 55 x 85l x 60l 85 10 (M) 10 (M) 60 x 90l x 60l 90 15 (M) 15 (M) 65 x 95l x 70l 95 20 (M) 20 (M) 70 x 100l x 75l 100 25 (M) 25 (M) 75 12.4 x 105l x 80l 105 30 (M) 30 (M) 80 15.5 x 110l x 85l 110 35 (M) 35 (M) 85 x 115l x 90l 115 40 (M) 40 (M) 90 x 120l x 95l 120 45 (M) 45 (M) 95 x 125l x 100l 125 50 (M) 50 (M) 100 x 150l CHKGB25 M5 x 55l 150 75 (M) 5 (M) 55 x 175l x 60l 175

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P. 25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Dual Type Flow rate and effective area Model ASD230FM-M5 ASD330FM-01 ASD430FM-02 8, 10 6 6, 8 Metric sizes 4, 6 Inch sizes Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" l/min (ANR) {Nl/min} 7 12 38 Flow rate Controlled flow Effective area mm 0.1 0.6 0.2 Free flow l/min (ANR) {Nl/min} Flow rate 175 350 295 75 Effective area mm 4.5 1.1 5.3 2.7 Note) Flow rates are values

End Lock Cylinder Series CBJ2

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

Refrigerated Air Dryer Series IDF/IDU

210 210 250 200 230 320 385 335 380 210 240 200 230 170 200 175 210 165 195 165 195 165 195 165 195 165 195 50Hz 60Hz 50Hz 60Hz AC 100V AC 200V Power consumption (W) Note2) 50/60Hz Refrigerant Air connection Weight R134a 28 Rc3/8 23 Rc1/2 27 Rc3/4 28 Rc3/4 27 23 Rc1/2 22 18 Rc3/8 17 16 (kg) White1 (Munsell 10Y8/0.5) Coating color Note1)The data for l/min (ANR) is under the conditions of