CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Reed switch D-A90, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod Anti-lateral Load 12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16

Air Cylinder

D-G

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Modular F.R.L. Unit

Note 2) AW20K to 40K 20 30 40 D Float type auto drain (N.O.)

Best Pneumatics Vol. 14

Accessory Optional specifications D Float type auto-drain (N.O.)

MLGC

/C8, D-H7 MNB CNA Hs 14.5 CNS CLS CLQ MLGP RLQ Auto switch D-B5/B6, D-G5/K5 MLU ML1C DHs 14.5 -X 20Data Auto switch D-B7/B8, D-G7/K7 Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto switch model D-G5 D-K59 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7W D-H7BAL D-H7NF

MLGC

D-G5 D-K59 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W Applicable bore size (mm) A A B A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5

Modular F.R.L. Unit

Accessory Optional specifications D Float type auto drain (N.O.)

MLGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGC MGF CY1 MY1 3.2-9 Series MLGC Proper Mounting Positions of Auto Switch (Stroke End) D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 Setting Positons of Auto Switch Mounting Height of Auto Switch (mm) (mm) Model D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-G5/K5 D-G5lW D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-B5/B6 D-G5lW D-K59W D-G5BAL D-G59F D-B7/B8

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGC MGF CY1 MY1 3.20-13 Series MGC Auto Switch Proper Mounting Position (Stroke End) D-C7, C8 D-H7 D-B5, B6 D-G5, K5 D-B7, B8 D-G7, K7 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-G5, K5 D-G5lW D-K59W D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-G5NTL D-C7, C8 D-H7 D-H7lW D-H7lF D-H7BAL Auto switch D-B7

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

MGP

P.336 P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

KN Series Nozzles for Blowing

D L1 VMG KN KN 861 KN Series Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Applicable fitting size d L1 A Weight (g) KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12-250 KN-Q12-300 5 5 5 9 9 16 16 23 23 18 18 18 20.5 20.5 22 22 24 24 35 35 35 39 39 43 43 45.5 45.5 6 6 6 8 8 10 10 12 12 1 1.5 2 1.5 2 2 2.5 2.5 3 D 10 A Connecting products with

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Electric Actuator Triple Axis P&P Unit

B 200W without brake C Motor specifications Matsushita Electric Industrial Co., LTD Motor specifications Mitsubisi Electric Corporation, Yaskawa Electric Corporation, OMRON Corporation Brake 750W without brake 200W with brake Symbol D L 750W with brake Stroke(mm) M 100 150 10 15 750W without brake N Matsushita Electric Industrial Co., LTD 750W with brake 950 1000 P 95 A0 Standard strokes

VFS

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

A

Note) (N)AM AM Japanese NAM North American H O W T O O R D E R M I S T S E P A R AT O R S E R I E S (N)AM (N)AM S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E Y Drain Guide 1/4 Internal Thread M With Drain Lock M5 Screw R IN, OUT Reverse Direction 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O P T I O N S None B Bracket

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.