Possible to transfer a workpiece at low-speed.

End of rotation Rotation starting point 5 5 5 5 5 e R g ot n End of rotation B ra at n io n io ra at n ot 5 g e R A B R o 5 t a 5 ti o n B r Rotation starting point a End of rotation n g e 5 5 5 A A Rotation starting point The figure shows the view from the long shaft end. The figure shows the view from the long shaft end. The figure shows the view from the long shaft end.

ISO Standard Hydraulic Cylinder

Water resistant (2-color indicator) 2-wire 12 V F5BA F59F 4-wire (NPN) IC circuit 5 V, 12 V Diagnostic output (2-color indicator) Table 1 Manufacturability Check List by Mounting Type and Port Position Z76 Z73 Z80 A54 A64 A59W 3-wire (NPN equiv.) 5 V IC circuit Yes 100 V No Yes No Yes 100 V or less 100 V, 200 V 200 V or less IC circuit Mounting bracket B LA FY FZ TA TC CA CB Grommet 12 V

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40A LEJS63A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75%

Compact Cylinder with Lock Series CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

100 CX 80 0.4 0.3 80 5 4 3 2 1 0.2 20 10 5 4 1 2 3 Dm3 max m2 max m1 max m3 max m2 max m1 max Load weight kg Load weight kg -X Horizontal impact: P = 0.5 MPa MY3A40 Horizontal impact: P = 0.5 MPa MY3A63 201000 1000 Data 500 500 Impact speed mm/s Impact speed mm/s Rubber bumper Rubber bumper 400 400 300 300 200 200 100 100 80 80 10 20 30 40 5 4 1 2 3 10 20 30 40 100 2 3 4 5 m3 maxm2 max m1

LEH_C

(2 )(3 ) 1/2 ()(0[mm]) () LEHZ(J):5 50 mmsec LEHF10 :5 20 mmsec LEHF203240 :530 mmsec LEHS:5 50 mmsec () () (40%) INP 1) INP ON 0.50 2) ()INP ON a) b) INP ON c) INP ON 21 - INP SV1.0* () INP ON SV0.6* a.40%() () INP ON b. 40% ON INP OFF LEHZ LEHZJ LEHF LEHS SV10 [mm/sec] () 4150 50% 100% 540 40% 100% 3150 70% 100% 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50%

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

JXCx-OMT0005CN

20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 TB No.

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.

IDU/IDF

to 75 5 to 70 5 to 60 0.15 to 1.0 2 to 40 (Relative humidity of 85% or less) Single phase, 100/100 to 110VAC (50/60Hz) 220, 240VAC (50Hz) 220 to 240VAC (50Hz) Three phase, 200/200 to 220VAC (50/60Hz) Single phase, 220, 240VAC (50Hz) Power source 50Hz 60Hz 50Hz 60Hz 50Hz 50Hz 50Hz 360 385 348 384 583 700 597 690 600 620 377 100 VAC Power consumption (W) 790 815 750 880 10 Air cooled 870

0.5

consumption: 5 mA or less Ionizer stop signal Connect with 0 V Voltage range: 5 VDC or less Current consumption: 5 mA or less Connect with 0 V Voltage range: 5 VDC or less Current consumption: 5 mA or less Input signal Maintenance signal Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 100 mA Residual

CQS

(mm) Long stroke range (mm) Standard stroke Without auto switch With auto switch Without/With auto switch Long stroke Bore size (mm) B L L1 A B L L1 A B L L1 17 17 19.5 22.5 A 12 16 20 25 14 15.5 18.5 22.5 3.5 3.5 4.5 5 22 22 29.5 32.5 31 31 42 45.5 26 26 32 35.5 14 15.5 18.5 22.5 24 25.5 28.5 32.5 5 to 30 5 to 30 5 to 50 5 to 50 3.5 3.5 4.5 5 13.5 13.5 14.5 15 35 to 100 35 to 100 75 to

Modular F.R.L. Units

Name plate and pressure gauge in imperial units: psi *6 *6 *6 *6 *6 Z*4 Name plate and pressure gauge in imperial units: psi *5 *5 *5 *5 *5 *5 *1 Options B, G, H are not assembled and supplied loose at the time of shipment. *2 Assembly of a bracket and set nuts (AR25-B to AR40-B) Including 2 mounting screws for the AR50-B and AR60-B *3 Mounting thread for pressure gauge: 1/8, Pressure gauge

Stroke Reading Cylinder and Counter

M9PWV M9BWV M9NAV1 Solid state auto switch Reed auto switch 5 V, 12 V 12 V IC circuit Diagnostic indication (2-color indicator) Relay, PLC IC circuit 5 V, 12 V 12 V Yes Yes No Grommet 24 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V A96V A96 IC circuit 5 V 12 V Grommet 24 V A93V2 A93 A90 100 V Relay, PLC 2-wire A90V IC circuit 100 V or less 1 Water

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.

V

) Operating Pressure 2 Position Double 0.1 ~ 0.7 (14.5 ~ 100) Range MPa (PSI) 3 Position 0.2 ~ 0.7 (30 ~ 100) External Pilot 2 Position Single 0.25 ~ 0.7 (37 ~ 100) Operating Pressure 2 Position Double 0.25 ~ 0.7 (37 ~ 100) Range MPa (PSI) 3 Position 0.25 ~ 0.7 (37 ~ 100) Ambient & Fluid Temperature C / F Max 50C / 122F Max Operating 2 Position Single 10 5 Frequency Hz 3 Position 3 3 Manual

energy saving effect

HRS Particle Filter Set HRS 090 HRS PF005 H Fluid Tap water Max. operating pressure 0.65 MPa HRS 100/150 Operating temperature range 5 to 35C Accessory Nominal filtration accuracy 5 m Symbol Accessory Nil None H With handle HRSH 090 Installation environment Indoors HRSH HRSH Parts List No.

Flow Control Equipment

32 to 63 40 to 100 40 to 100 40 to 100 / 1 8 / 1 4 / 1 4 4.1-35 / 3 8 / 1 4 / 3 8 / 1 2 Applicable tube O.D Applicable cylinder bore size (mm) Page Metric size (mm) Inch size (Inch) Model Port size in cylinder side M5 / 1 8 / 5 32 / 3 16 / 1 4 / 5 16 / 3 8 / 1 2 3.2 4 6 8 10 12 With One-touch Fittings/Elbow 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l 1FG-M5 AS22l 1FG-01 AS22l 1FG-

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

(n2) 100 35 3.4-5 Series CBM2 Accessories/Details are the same as that of standard style of series CM2.

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100