Electric Actuator with Integrated Guide OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.
Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.
8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 42 50 59 76 92 100 110 130 160 180 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 x 1.25 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 CLS 13.5 83 M12 x
8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 42 50 59 76 92 100 110 130 160 180 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 x 1.25 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 CLS 13.5 83 M12 x
size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.
Mounting holes (58) 15 15 1.5 1.5 P 3 5 1 2-PE port 2-Rc(PT)1/8 R port 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port 0 1 0 1 DIN connector (Y): VQZ322 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ322 (R)wLwC6,C8,C10,02 142 <144> 300 (Lead wire length) 71 <72> Indicator light 31.5 <35> 150 MAX.10 75 Applicable cord O.D.
(Load current: 150 mA) NPN open collector output Maximum load current: 80 mA Residual voltage: 1 V or less (Load current: 80 mA) Maximum load voltage: 26.4 VDC PNP open collector output Maximum load current: 80 mA Residual voltage: 1 V or less (Load current: 80 mA) Maximum load current: 150 mA Switch output Residual voltage: 1 V or less (Load current: 150 mA) Maximum load voltage: 26.4 VDC
9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.
9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !
D-A5/A6 Same side 10 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs. D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.
3 4 5 1 5 10. 1 2 3 4 5 6 7 8 9 10 11. 1 (d=) 6 11-1. 1 1 2 3005mm 4 5 6 7 2d(MGPS1.5d MGP MGPS (d=) (d=) (mm) (mm) 7 11-1. 13 34 (mm) 3mm 20,25,32,40 16 JIS B46481.5 50,63 JIS B46482.5 80,100 JIS B4648 2 3) 12. 12-1. 2 12-2. 1) 1) 2 3) 1ISOVG32 8 4 0.7 12-3. 1 12-4. 1) 1.52 13. 1 2 1 1060 14. 12 9 15.
150 143 152 168 168 208 208 24 24 24 24 40 40 6.5 9 10.5 12 14 15 4 4 5 9 11.5 17 92 97 106 106 132 132 11 11 11 11 21 21 1/8 1/4 1/4 3/8 3/8 1/2 35 40 43.5 43.5 56 56 27 27 31.5 31.5 38 38 19 19 19 19 23 23 1.7-34 End Lock Series MBB With Mounting Bracket Foot(L)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) ZZ LS ZZ LZ LY LX LT LS LH LD Y X 32 40
Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible
Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150
Weight (g) Connection thread KN-R01-100 KN-R01-150 KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17 22 22 27 27 36 21.4 21 31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1
AC55 1 AF60 AR60 AL60 AC60 1 AW + AL AL10 AW10 AC10A M5 x 0.8 AL20 AW20 AC20A 1/8, 1/4 AL30 AW30 AC30A 1/4, 3/8 AL40 AW40 AC40A 1/4, 3/8, 1/2 AL40-06 AW40-06 AC40A-06 3/4 AF + AR AF10 AR10 AC10B M5 x 0.8 AF20 AR20 AC20B 1/8, 1/4 AF30 AR25 AC25B 1/4, 3/8 AF30 AR30 AC30B 1/4, 3/8 AF40 AR40 AC40B 1/4, 3/8, 1/2 AF40-06 AR40-06 AC40B-06 3/4 AF50 AR50 AC50B 3/4, 1 AF60 AR50 AC55B 1 AF60 AR60 AC60B
1/4 3/8 1/2 3/4 1/8 1/4 1/4 Port size 3/4 1 1 G 1 1/4 3/8 3/8 PPA How to Order Refer to the next page.
AL60 AC60 1 AF60 AR60 AL60 AW + AL AC10A M5 x 0.8 AL10 AW10 AC20A 1/8, 1/4 AL20 AW20 AC30A 1/4, 3/8 AL30 AW30 AC40A 1/4, 3/8, 1/2 AL40 AW40 AC40A-06 3/4 AL40-06 AW40-06 AF + AR AC10B M5 x 0.8 AF10 AR10 AC20B 1/8, 1/4 AF20 AR20 AC25B 1/4, 3/8 AF30 AR25 AC30B 1/4, 3/8 AF30 AR30 AC40B 1/4, 3/8, 1/2 AF40 AR40 AC40B-06 3/4 AF40-06 AR40-06 AC50B 3/4, 1 AF50 AR50 AC55B 1 AF60 AR50 AC60B 1 AF60