HRX-OM-Q026 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-4 7.2.3 Inspection every 3 months . 7-5 7.2.4 Inspection during winter season . 7-7 7.3 Consumables . 7-7 7.4 Operation Stop for an Extended Period of Time . 7-8 7.4.1 Discharge of the circulating fluid .
A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown DC
HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5(n -1) 31n +3.5(n -1) -82No.PS-OMU0005CN-C Revision history A [2018
Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9
Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2
Note 3) Refer to p.1.12-7 for power consumption for AC style.
N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) (A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) Note) C 5 (R1) 3 (R2) 1 (P) 1 (P) 5 (R1) 3 (R2) N.C.
Display Pressure: 0.7MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: -
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: Nickel Plated
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: X3 [Wetted Parts Stainless Steel (Movable Parts Inside are Brass)]
Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.7, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/8, Option: None, Size: 42.5, Grade: Parts: general degreasing, Assembly: general production line, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit
Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line)
Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5)
Flow setting: 7 300 250 200 Flow setting: 6 150 Flow setting: 4 100 Flow setting: 0 Flow setting: 2 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Pressure [MPa] How to measure Pressure measurement Air supply measurement Connecting tube: O.D. 8 x I.D. 5, 50 mm 184 Gun Type Ionizer IZG10 Series RoHS How to Order IZG10 08 01 01 AC adapter*1, Power supply cable One-touch fitting Nozzle type Symbol Port size
C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520
4-1/8 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 3-3/8 3-5/8 3-7/8 4-1/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 3-1/2 3-3/4 4 4-1/4 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 4-1/4 4-1/2 4-3/4 5 0.19 0.33 0.25 0.21 0.39 0.27 0.45 0.27 27 Series NCQ8 Mounting Bolt Size for NCDQ8B056 to 250-T (With Auto Switch) (Inch) Model D C Bolt size Model D C Bolt size NCDQ8B056-025T 037T 050T 062T
SYA7000 SYA 5 1 C6 Body ported 20 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without
Model/Series SYA340 (Base mounted) Valve model Type of actuation Port size Flow characteristics Note 1) Mass Note 2) Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) (g) Cv b Cv C (dm3/ (sbar) ) C (dm3/(sbar) ) 69 (34) 71 (36) Single Double 2 position 0.30 1.0 0.24 1.1 0.30 0.26 0.28 0.18 0.85 0.30 0.77 M5 x 0.8 0.19 Closed center Exhaust center Pressure center SYA340-01 1 8 3 position
-23ST 13.5 12 1/4" 3.2 8.4 12.7 AS221F-N01-01ST AS221F-01-04ST 1/8" 8.4 4 20.4 27.5 9.3 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-N01-03ST AS221F-01-06ST 13.5 12 R 1/8 14.2 7 35.6 1.5 31.6 6 11.6 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-N01-05ST AS221F-01-08ST NPT 1/8 12.7 14.2 7 35.6 1.5 31.6 25.3 32.4 18.5 8 15.2 AS221F-N01-07ST AS221F-01-10ST 1/4" 13.2 23.9 31 18.5 33.1 40.2 15 21 10 18.5 AS221F-N01