SQ1000/2000

The maximum number of stations is 10 (16 optional). Configuration Maximum number of stations Series Port position Port size P, R A, B C10 C4, C6, C8 10 stations (16 stations optional) SQ2000 Side, Top D side U side 1 2 3 . stations 2-G3/4" Electrical entry Valves are numbered from the D side.

ZP

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

CQ2

U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9 6 6.5 5 35 36 42 38.5 41.5

Series SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Series SV2000 ... ... 20 For 20 stations Stations 2 stations Symbol 02 Note Note 1) Double wiring specification ... ... ... ...

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

stations 335.5 325 309 13.5 295 L1 L2 L3 L4 L5 145 Base Mounted 10-SY9000 Type 43P C8, N9 C10, N11 C12 02, 03, [ ]: AC 10-SY9000: 10-SS5Y9-43PStations U (-D) When P, R port outlets are indicated on the U side, the P, R ports on the opposite side are plugged.

VFR

10 D side mounting None M Mixed U 01C, 01F U side mounting For bottom ported: 1/2 only.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

SX

Symbol Stations Mounting position D U B 2 to 20 stations 2 to 10 stations 2 to 10 stations D side U side Both sides M Special specifications For special specifications, indicate separately by the manifold specification sheet.

42

n n Manual override 19 VQ7 Indicator light 6 6 Indicator light 5 5 3/8", 1/2" 4(A), 2(B) port Manual override 4 4 L1 P = 41 58.5 L2 L1 P = 41 58.5 3 3 2 2 1 1 34.5 48 68.5 Stations Stations 34.5 48 216 with AMC610-10 installed ( 261.5 with AMC810-14 installed) D side entry (LD) 216 with AMC610-10 installed ( 261.5 with AMC810-14 installed) U side D side U side D side =100 with AMC610-10

MGP

Stroke (mm) Bore size (mm) Bearing 25 50 75 100 125 150 175 200 16 20 25 32 40 50 63 80 100 U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U Built-in cushion valve inside the body U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U MGPM Slide bearing MGPL Ball bushing bearing Oversized Guide Rod Series MGPS 50, 80 Improved Load Resistance Oversized Guide Rod

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U A B A B A B A B A B A B U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 12 22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5 24.5 5 7 8 6.5 7.5 4 30 34 31 34.5 28.5 27.5 5 7.5 8 7 7.5 4.5 34 27 38 29 26.5 35 38.5 32.5 31.5 6.5 6.5 9.5 6 9 3.5 5 12 9 11 8 8 37.5 30.5 41.5 32.5 30 38.5 42 36 35 10.5 9 13.5

ZP3

Form w 1 Material 10 N S U F GN GS 2 10 10 11 2 C ZP3 B 13 13 14 3 16 16 17 A B 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 10 to 16 w q ZP3 B T N 10 A5 M5 x 0.8 Width across flats 10 e Connection thread (Male thread) 10 3 A5 M5 x 0.8 Model Vacuum inlet

V

www.stevenengineering.com I 6.12 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H B U F F E R ZPT N P A D D I A M E T E R M O U N T I N G T H R E A D 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Symbol Thread dia. 2~8 10~32 40~50 A8 M8X1 Male thread A10 M10X1 A14 M14X1 V A C U U M E N T R Y Symbol Port size 2~8 10~32 40~50

SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 20 For 20 stations Note) Note) Able to specify the length for 3 stations up to 18 stations for SV1000, which is available with 18 stations at the maximum.

Electric Actuator/Slider Type

70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LEYG25M LEYG25M 0.1 0.1 100 1000 70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200 mm/s or less

Vacuum Pad

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

V100

Number No. r t y u i SS070A 01 1A O-ring FKM 10 SS070A-80A-1 VFN Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > w U side end plate assembly no.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).