Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Cooling Capacity: 38 kW, Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, with Rc-NPT Conversion Fitting, Power Supply: 50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC, Option: Applicable to Deionized Water Piping

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, THERMO CHILLER, AIR COOLED SPL, OTHERS, HRS THERMO-CHILLERS, 2X, HRS - NO SIZE RATING, 94.79877 lb

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: -

Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: -, Cooling Method: -, Pipe Thread: -, Option 1: -, Option 2: -

Cooling Capacity: -, Cooling Method: -, Pipe Thread: -, Option 1: -, Option 2: -

1

6) Note 4) CKQ D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) CKZ2N D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) WRF Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

Table of Contents

) L1 = 50 [mm] L2 = 40 [mm] m L2 L1 Item Load factor an Note 1.

Table of Contents

Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Table of Contents

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

Air Slide Table

Extension stroke end adjuster Retraction stroke end adjuster Extension stroke end adjuster Retraction stroke end adjuster MXQ8A-m-X2192 30 40 15 23 5 10 12 8 3 13 16.6 18.2 M6 x 0.75 2.5 MXQA-CS8-X2202 MXQA-CT8 MXQA-DS8-X2202 MXQA-DT8 MXQ12A-m-X2192 35 45 17 26 6.5 10 14 10 4 16.2 18.9 20.7 M8 x 1 2.5 MXQA-CS12-X2202 MXQA-CT12 MXQA-DS12-X2202 MXQA-DT12 MXQ16A-m-X2192 40 50 18 27 8 10 15 12

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).