Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: -, Cooling Method: -, Pipe Thread: -, Option 1: -, Option 2: -

Cooling Capacity: -, Cooling Method: -, Pipe Thread: -, Option 1: -, Option 2: -

1

6) Note 4) CKQ D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) CKZ2N D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) WRF Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

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) L1 = 50 [mm] L2 = 40 [mm] m L2 L1 Item Load factor an Note 1.

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Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

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10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

Air Slide Table

Extension stroke end adjuster Retraction stroke end adjuster Extension stroke end adjuster Retraction stroke end adjuster MXQ8A-m-X2192 30 40 15 23 5 10 12 8 3 13 16.6 18.2 M6 x 0.75 2.5 MXQA-CS8-X2202 MXQA-CT8 MXQA-DS8-X2202 MXQA-DT8 MXQ12A-m-X2192 35 45 17 26 6.5 10 14 10 4 16.2 18.9 20.7 M8 x 1 2.5 MXQA-CS12-X2202 MXQA-CT12 MXQA-DS12-X2202 MXQA-DT12 MXQ16A-m-X2192 40 50 18 27 8 10 15 12

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

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Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

SY

SS5Y71, #1 + #10 M type plug connector .

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

Electric Actuator/Slider Type

m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 0 0 00 0 5 10 15 20 0 4 2 6 8 10 10 20 30 L4 Work load [kg] Work load

ZP

Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.

ZP

Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075 x 1 m SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN200-02 AN200-02 AN202-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1

Electric Actuators

m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 10 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PC Scale: 10% When two dimensions are shown, the top

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The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain).

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

MY1

20 50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.